Controlling the crystallinity and roughness of atomic layer deposited titanium dioxide films

Riikka Puurunen, Timo Sajavaara, Eero Santala, Ville Miikkulainen, Tapio Saukkonen, Mikko Laitinen, Markku Leskelä

Research output: Contribution to journalArticleScientificpeer-review

43 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Controlling the crystallinity and roughness of atomic layer deposited titanium dioxide films'. Together they form a unique fingerprint.

Engineering

Physics

Material Science