Controlling the solubility of ALD aluminium oxide in deionised water

Riikka Puurunen, Jyrki Kiihamäki, Hannu Kattelus

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2005
MoE publication typeNot Eligible
Event5th International Conference on Atomic Layer Deposition, ALD 2005 - San Jose, United States
Duration: 8 Aug 200510 Aug 2005

Conference

Conference5th International Conference on Atomic Layer Deposition, ALD 2005
CountryUnited States
CitySan Jose
Period8/08/0510/08/05

Cite this

Puurunen, R., Kiihamäki, J., & Kattelus, H. (2005). Controlling the solubility of ALD aluminium oxide in deionised water. Abstract from 5th International Conference on Atomic Layer Deposition, ALD 2005, San Jose, United States.