Controlling the solubility of ALD aluminium oxide in deionised water

Riikka Puurunen; Jyrki Kiihamäki; Hannu Kattelus

Controlling the solubility of ALD aluminium oxide in deionised water

Riikka Puurunen
, Jyrki Kiihamäki
, Hannu Kattelus

VTT (former employee or external)

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2005
MoE publication type	Not Eligible
Event	5th International Conference on Atomic Layer Deposition, ALD 2005 - San Jose, United States Duration: 8 Aug 2005 → 10 Aug 2005

Conference

Conference	5th International Conference on Atomic Layer Deposition, ALD 2005
Country/Territory	United States
City	San Jose
Period	8/08/05 → 10/08/05

Cite this

@conference{8b0550c1f997446b857ce660d0faa792,

title = "Controlling the solubility of ALD aluminium oxide in deionised water",

author = "Riikka Puurunen and Jyrki Kiiham{\"a}ki and Hannu Kattelus",

note = "Abstrakti on julkaistu CD:ll{\"a}/DVD:ll{\"a} Project code: T5SU00327; 5th International Conference on Atomic Layer Deposition, ALD 2005 ; Conference date: 08-08-2005 Through 10-08-2005",

year = "2005",

language = "English",

}

TY - CONF

T1 - Controlling the solubility of ALD aluminium oxide in deionised water

AU - Puurunen, Riikka

AU - Kiihamäki, Jyrki

AU - Kattelus, Hannu

N1 - Abstrakti on julkaistu CD:llä/DVD:llä Project code: T5SU00327

PY - 2005

Y1 - 2005

M3 - Conference Abstract

T2 - 5th International Conference on Atomic Layer Deposition, ALD 2005

Y2 - 8 August 2005 through 10 August 2005

ER -