Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

Alexander V. Korovin, Yan Pennec, Matteo Stocchi, Davide Mencarelli, Luca Pierantoni, Tapani Makkonen, Jouni Ahopelto, Bahram Djafari Rouhani

    Research output: Contribution to journalArticleScientificpeer-review

    1 Citation (Scopus)

    Abstract

    The generation of acoustic waves in structured nanobeams containing optomechanic cavities is a topic of current interest. In this paper, we theoretically study the efficient conversion of surface acoustic waves (SAW) generated on a substrate by an RF electric signal into the acoustic waves of a nanobeam. First, we demonstrate the possibility of converting the SAW generated on a silicon substrate with a thin piezoelectric AlN layer into the guided mechanical modes of a straight nanobeam with a maximum efficiency of -22.6 dB. This can be achieved by using a set of inter-digitated transducers with radial fingers, which provide SAW focusing towards the nanobeam entrance. We analyse the nature of the modes created inside the nanobeam and the conversion efficiency of the SAW into the different modes. Then, we study the interaction of these waves with a one-dimensional phononic crystal nanobeam containing a cavity. The latter is constituted by an array of holes and stubs and has been proven in our recent works to be very efficient for optomechanic applications. We calculate the transmission properties of the cavity modes and discuss the efficiency of generating the cavity modes from the initial SAW.

    Original languageEnglish
    Article number32LT01
    JournalJournal of Physics D: Applied Physics
    Volume52
    Issue number32
    DOIs
    Publication statusPublished - 6 Jun 2019
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Surface waves
    Acoustic waves
    acoustics
    cavities
    Silicon
    Substrates
    Conversion efficiency
    Transducers
    entrances
    transducers
    Crystals
    silicon
    crystals

    Keywords

    • optomechanic cavity
    • phononic
    • piezoelectricity
    • surface acoustic wave

    Cite this

    Korovin, A. V., Pennec, Y., Stocchi, M., Mencarelli, D., Pierantoni, L., Makkonen, T., ... Djafari Rouhani, B. (2019). Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam. Journal of Physics D: Applied Physics, 52(32), [32LT01]. https://doi.org/10.1088/1361-6463/ab2297
    Korovin, Alexander V. ; Pennec, Yan ; Stocchi, Matteo ; Mencarelli, Davide ; Pierantoni, Luca ; Makkonen, Tapani ; Ahopelto, Jouni ; Djafari Rouhani, Bahram. / Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam. In: Journal of Physics D: Applied Physics. 2019 ; Vol. 52, No. 32.
    @article{67d1859e8e864023a2e1c2b8e61c4007,
    title = "Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam",
    abstract = "The generation of acoustic waves in structured nanobeams containing optomechanic cavities is a topic of current interest. In this paper, we theoretically study the efficient conversion of surface acoustic waves (SAW) generated on a substrate by an RF electric signal into the acoustic waves of a nanobeam. First, we demonstrate the possibility of converting the SAW generated on a silicon substrate with a thin piezoelectric AlN layer into the guided mechanical modes of a straight nanobeam with a maximum efficiency of -22.6 dB. This can be achieved by using a set of inter-digitated transducers with radial fingers, which provide SAW focusing towards the nanobeam entrance. We analyse the nature of the modes created inside the nanobeam and the conversion efficiency of the SAW into the different modes. Then, we study the interaction of these waves with a one-dimensional phononic crystal nanobeam containing a cavity. The latter is constituted by an array of holes and stubs and has been proven in our recent works to be very efficient for optomechanic applications. We calculate the transmission properties of the cavity modes and discuss the efficiency of generating the cavity modes from the initial SAW.",
    keywords = "optomechanic cavity, phononic, piezoelectricity, surface acoustic wave",
    author = "Korovin, {Alexander V.} and Yan Pennec and Matteo Stocchi and Davide Mencarelli and Luca Pierantoni and Tapani Makkonen and Jouni Ahopelto and {Djafari Rouhani}, Bahram",
    year = "2019",
    month = "6",
    day = "6",
    doi = "10.1088/1361-6463/ab2297",
    language = "English",
    volume = "52",
    journal = "Journal of Physics D: Applied Physics",
    issn = "0022-3727",
    publisher = "Institute of Physics IOP",
    number = "32",

    }

    Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam. / Korovin, Alexander V.; Pennec, Yan; Stocchi, Matteo; Mencarelli, Davide; Pierantoni, Luca; Makkonen, Tapani; Ahopelto, Jouni; Djafari Rouhani, Bahram.

    In: Journal of Physics D: Applied Physics, Vol. 52, No. 32, 32LT01, 06.06.2019.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

    AU - Korovin, Alexander V.

    AU - Pennec, Yan

    AU - Stocchi, Matteo

    AU - Mencarelli, Davide

    AU - Pierantoni, Luca

    AU - Makkonen, Tapani

    AU - Ahopelto, Jouni

    AU - Djafari Rouhani, Bahram

    PY - 2019/6/6

    Y1 - 2019/6/6

    N2 - The generation of acoustic waves in structured nanobeams containing optomechanic cavities is a topic of current interest. In this paper, we theoretically study the efficient conversion of surface acoustic waves (SAW) generated on a substrate by an RF electric signal into the acoustic waves of a nanobeam. First, we demonstrate the possibility of converting the SAW generated on a silicon substrate with a thin piezoelectric AlN layer into the guided mechanical modes of a straight nanobeam with a maximum efficiency of -22.6 dB. This can be achieved by using a set of inter-digitated transducers with radial fingers, which provide SAW focusing towards the nanobeam entrance. We analyse the nature of the modes created inside the nanobeam and the conversion efficiency of the SAW into the different modes. Then, we study the interaction of these waves with a one-dimensional phononic crystal nanobeam containing a cavity. The latter is constituted by an array of holes and stubs and has been proven in our recent works to be very efficient for optomechanic applications. We calculate the transmission properties of the cavity modes and discuss the efficiency of generating the cavity modes from the initial SAW.

    AB - The generation of acoustic waves in structured nanobeams containing optomechanic cavities is a topic of current interest. In this paper, we theoretically study the efficient conversion of surface acoustic waves (SAW) generated on a substrate by an RF electric signal into the acoustic waves of a nanobeam. First, we demonstrate the possibility of converting the SAW generated on a silicon substrate with a thin piezoelectric AlN layer into the guided mechanical modes of a straight nanobeam with a maximum efficiency of -22.6 dB. This can be achieved by using a set of inter-digitated transducers with radial fingers, which provide SAW focusing towards the nanobeam entrance. We analyse the nature of the modes created inside the nanobeam and the conversion efficiency of the SAW into the different modes. Then, we study the interaction of these waves with a one-dimensional phononic crystal nanobeam containing a cavity. The latter is constituted by an array of holes and stubs and has been proven in our recent works to be very efficient for optomechanic applications. We calculate the transmission properties of the cavity modes and discuss the efficiency of generating the cavity modes from the initial SAW.

    KW - optomechanic cavity

    KW - phononic

    KW - piezoelectricity

    KW - surface acoustic wave

    UR - http://www.scopus.com/inward/record.url?scp=85069738189&partnerID=8YFLogxK

    U2 - 10.1088/1361-6463/ab2297

    DO - 10.1088/1361-6463/ab2297

    M3 - Article

    AN - SCOPUS:85069738189

    VL - 52

    JO - Journal of Physics D: Applied Physics

    JF - Journal of Physics D: Applied Physics

    SN - 0022-3727

    IS - 32

    M1 - 32LT01

    ER -