Crystallization of silica opals onto patterned silicon wafer

J. Ye, R. Zentel, Sanna Arpiainen, Jouni Ahopelto, F. Jonsson, S.G. Romanov, C.M. Sotomayor Torres

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.
    Original languageEnglish
    Title of host publicationPhotonic Crystal Materials and Devices III
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages9
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

    Publication series

    SeriesProceedings of SPIE
    Volume6182
    ISSN0277-786X

    Fingerprint

    wafers
    crystallization
    silicon dioxide
    integrated optics
    silicon
    stirring
    optical measurement
    film thickness
    cracks
    selectivity
    photonics
    fabrication
    geometry
    crystals

    Cite this

    Ye, J., Zentel, R., Arpiainen, S., Ahopelto, J., Jonsson, F., Romanov, S. G., & Sotomayor Torres, C. M. (2006). Crystallization of silica opals onto patterned silicon wafer. In Photonic Crystal Materials and Devices III [61821U] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 6182 https://doi.org/10.1117/12.661660
    Ye, J. ; Zentel, R. ; Arpiainen, Sanna ; Ahopelto, Jouni ; Jonsson, F. ; Romanov, S.G. ; Sotomayor Torres, C.M. / Crystallization of silica opals onto patterned silicon wafer. Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE, 2006. (Proceedings of SPIE, Vol. 6182).
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    title = "Crystallization of silica opals onto patterned silicon wafer",
    abstract = "We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.",
    author = "J. Ye and R. Zentel and Sanna Arpiainen and Jouni Ahopelto and F. Jonsson and S.G. Romanov and {Sotomayor Torres}, C.M.",
    year = "2006",
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    Ye, J, Zentel, R, Arpiainen, S, Ahopelto, J, Jonsson, F, Romanov, SG & Sotomayor Torres, CM 2006, Crystallization of silica opals onto patterned silicon wafer. in Photonic Crystal Materials and Devices III., 61821U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 6182. https://doi.org/10.1117/12.661660

    Crystallization of silica opals onto patterned silicon wafer. / Ye, J.; Zentel, R.; Arpiainen, Sanna; Ahopelto, Jouni; Jonsson, F.; Romanov, S.G.; Sotomayor Torres, C.M.

    Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE, 2006. 61821U (Proceedings of SPIE, Vol. 6182).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AU - Zentel, R.

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    AU - Romanov, S.G.

    AU - Sotomayor Torres, C.M.

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    N2 - We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.

    AB - We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.

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    Ye J, Zentel R, Arpiainen S, Ahopelto J, Jonsson F, Romanov SG et al. Crystallization of silica opals onto patterned silicon wafer. In Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE. 2006. 61821U. (Proceedings of SPIE, Vol. 6182). https://doi.org/10.1117/12.661660