Crystallization of silica opals onto patterned silicon wafer

J. Ye, R. Zentel, Sanna Arpiainen, Jouni Ahopelto, F. Jonsson, S.G. Romanov, C.M. Sotomayor Torres

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.
Original languageEnglish
Title of host publicationPhotonic Crystal Materials and Devices III
PublisherInternational Society for Optics and Photonics SPIE
Number of pages9
DOIs
Publication statusPublished - 2006
MoE publication typeA4 Article in a conference publication

Publication series

SeriesProceedings of SPIE
Volume6182
ISSN0277-786X

Fingerprint

wafers
crystallization
silicon dioxide
integrated optics
silicon
stirring
optical measurement
film thickness
cracks
selectivity
photonics
fabrication
geometry
crystals

Cite this

Ye, J., Zentel, R., Arpiainen, S., Ahopelto, J., Jonsson, F., Romanov, S. G., & Sotomayor Torres, C. M. (2006). Crystallization of silica opals onto patterned silicon wafer. In Photonic Crystal Materials and Devices III [61821U] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 6182 https://doi.org/10.1117/12.661660
Ye, J. ; Zentel, R. ; Arpiainen, Sanna ; Ahopelto, Jouni ; Jonsson, F. ; Romanov, S.G. ; Sotomayor Torres, C.M. / Crystallization of silica opals onto patterned silicon wafer. Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE, 2006. (Proceedings of SPIE, Vol. 6182).
@inproceedings{ec4f607c732146adbfcdf45e329806a3,
title = "Crystallization of silica opals onto patterned silicon wafer",
abstract = "We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.",
author = "J. Ye and R. Zentel and Sanna Arpiainen and Jouni Ahopelto and F. Jonsson and S.G. Romanov and {Sotomayor Torres}, C.M.",
year = "2006",
doi = "10.1117/12.661660",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Photonic Crystal Materials and Devices III",
address = "United States",

}

Ye, J, Zentel, R, Arpiainen, S, Ahopelto, J, Jonsson, F, Romanov, SG & Sotomayor Torres, CM 2006, Crystallization of silica opals onto patterned silicon wafer. in Photonic Crystal Materials and Devices III., 61821U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 6182. https://doi.org/10.1117/12.661660

Crystallization of silica opals onto patterned silicon wafer. / Ye, J.; Zentel, R.; Arpiainen, Sanna; Ahopelto, Jouni; Jonsson, F.; Romanov, S.G.; Sotomayor Torres, C.M.

Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE, 2006. 61821U (Proceedings of SPIE, Vol. 6182).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Crystallization of silica opals onto patterned silicon wafer

AU - Ye, J.

AU - Zentel, R.

AU - Arpiainen, Sanna

AU - Ahopelto, Jouni

AU - Jonsson, F.

AU - Romanov, S.G.

AU - Sotomayor Torres, C.M.

PY - 2006

Y1 - 2006

N2 - We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.

AB - We report on fabrication of high quality opaline photonic crystals from large silica spheres, self-assembled in hydrophilic trenches of silicon wafers by using a drawing apparatus with a combination of stirring. The achievements here reported comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good three-dimensional order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step towards applications of opals in integrated optics. The influence of substrate structure on crystallization is also discussed.

U2 - 10.1117/12.661660

DO - 10.1117/12.661660

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

BT - Photonic Crystal Materials and Devices III

PB - International Society for Optics and Photonics SPIE

ER -

Ye J, Zentel R, Arpiainen S, Ahopelto J, Jonsson F, Romanov SG et al. Crystallization of silica opals onto patterned silicon wafer. In Photonic Crystal Materials and Devices III. International Society for Optics and Photonics SPIE. 2006. 61821U. (Proceedings of SPIE, Vol. 6182). https://doi.org/10.1117/12.661660