Cubic-inch MOEMS spectral imager

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Recently developed tunable MEMS Fabry- Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imagers covering almost the complete VNIR wavelength range. The level of miniaturization required by modern smartphone industry has created extremely compact, high performance electronics and camera technologies and by utilizing these technologies together with the novel MEMS FPI's, it is possible to create extremely compact spectral imagers while still achieving good performance. This paper presents a spectral imager design that can be fit inside an envelope of 1 cubic inch (25.4 × 25.4 × 25.4 mm3) and it will be capable of recording images at freely selectable wavelengths within the range of ca. 650 nm - 950 nm. The imager field of view is ca. 12.5° × 10° and the image size is 640 × 512 pixels. Nominally the imager will be focused from ca. 0.5 m to infinity, but with additional optics it is possible to use the imager as a microscope. The compact size of the imager allows the easy integration to almost any available platform, including small drones, nanosatellites or planetary rovers, where small size is essential. It is also possible to integrate the imager to handheld devices, so the potential field of applications will be extensive.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVIII
EditorsWibool Piyawattanametha, Yong-Hwa Park, Hans Zappe
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)9781510625044
DOIs
Publication statusPublished - 1 Jan 2019
MoE publication typeA4 Article in a conference publication
EventMOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States
Duration: 2 Feb 20194 Feb 2019

Publication series

SeriesProceedings of SPIE
Volume10931
ISSN0277-786X

Conference

ConferenceMOEMS and Miniaturized Systems XVIII 2019
CountryUnited States
CitySan Francisco
Period2/02/194/02/19

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Keywords

  • Fabry-Perot interferometer
  • Hyperspectral imager
  • MOEMS
  • VNIR
  • OtaNano

Cite this

Näsilä, A., Holmlund, C., Briede, E., Mannila, R., Trops, R., Blomberg, M., Stuns, I., Guo, B., Viherkanto, K., Rainio, K., Saari, H., & Rissanen, A. (2019). Cubic-inch MOEMS spectral imager. In W. Piyawattanametha, Y-H. Park, & H. Zappe (Eds.), MOEMS and Miniaturized Systems XVIII [109310F] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10931 https://doi.org/10.1117/12.2508420