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Cubic-inch MOEMS spectral imager

    • VTT (former employee or external)

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Recently developed tunable MEMS Fabry- Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imagers covering almost the complete VNIR wavelength range. The level of miniaturization required by modern smartphone industry has created extremely compact, high performance electronics and camera technologies and by utilizing these technologies together with the novel MEMS FPI's, it is possible to create extremely compact spectral imagers while still achieving good performance. This paper presents a spectral imager design that can be fit inside an envelope of 1 cubic inch (25.4 × 25.4 × 25.4 mm3) and it will be capable of recording images at freely selectable wavelengths within the range of ca. 650 nm - 950 nm. The imager field of view is ca. 12.5° × 10° and the image size is 640 × 512 pixels. Nominally the imager will be focused from ca. 0.5 m to infinity, but with additional optics it is possible to use the imager as a microscope. The compact size of the imager allows the easy integration to almost any available platform, including small drones, nanosatellites or planetary rovers, where small size is essential. It is also possible to integrate the imager to handheld devices, so the potential field of applications will be extensive.

    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XVIII
    EditorsWibool Piyawattanametha, Yong-Hwa Park, Hans Zappe
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)9781510625044
    DOIs
    Publication statusPublished - 1 Jan 2019
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States
    Duration: 2 Feb 20194 Feb 2019

    Publication series

    SeriesProceedings of SPIE
    Volume10931
    ISSN0277-786X

    Conference

    ConferenceMOEMS and Miniaturized Systems XVIII 2019
    Country/TerritoryUnited States
    CitySan Francisco
    Period2/02/194/02/19

    Funding

    VTT’s Fabry-Perot interferometer (FPI) technology enables mass producible tunable optical filters, which can be used to realize extremely small and cost-efficient hyperspectral imager and miniaturized spectrometers. As there are solutions for different wavelength ranges from UV to thermal IR, several novel applications have arisen from the technology, including nanosatellite spectral imagers for atmospheric sensing and vegetation or mineral mapping [2, 3]. Ground based applications include skin cancer screening, automotive fuel quality sensors and mobile gas sensing devices. This paper presents the most miniaturized VNIR spectral imager design so far, designed with the support of the European Space Agency. The imager is based on VTT’s MEMS Fabry-Perot interferometer (MFPI) technology, and it will fit inside an envelope of 1 cubic inch, and it can be easily fitted inside even the smallest planetary rovers, drones or orbiting satellites.

    Keywords

    • Fabry-Perot interferometer
    • Hyperspectral imager
    • MOEMS
    • VNIR
    • OtaNano

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