Current crowding and misaligment effects as sources of error in contact resistivity measurements

Part II. Experimental results and computer simulation of self-aligned test structures

Paolo Cappelletti, Manuela Finetti, Andrea Scorzoni, Ilkka Suni, Nadia Circelli, Libera Giovanna Dalla

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)532-536
JournalIEEE Transactions on Electron Devices
Volume34
Issue number3
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

Cite this

Cappelletti, Paolo ; Finetti, Manuela ; Scorzoni, Andrea ; Suni, Ilkka ; Circelli, Nadia ; Dalla, Libera Giovanna. / Current crowding and misaligment effects as sources of error in contact resistivity measurements : Part II. Experimental results and computer simulation of self-aligned test structures. In: IEEE Transactions on Electron Devices. 1987 ; Vol. 34, No. 3. pp. 532-536.
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title = "Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures",
author = "Paolo Cappelletti and Manuela Finetti and Andrea Scorzoni and Ilkka Suni and Nadia Circelli and Dalla, {Libera Giovanna}",
year = "1987",
doi = "10.1109/T-ED.1987.22959",
language = "English",
volume = "34",
pages = "532--536",
journal = "IEEE Transactions on Electron Devices",
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Cappelletti, P, Finetti, M, Scorzoni, A, Suni, I, Circelli, N & Dalla, LG 1987, 'Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures', IEEE Transactions on Electron Devices, vol. 34, no. 3, pp. 532-536. https://doi.org/10.1109/T-ED.1987.22959

Current crowding and misaligment effects as sources of error in contact resistivity measurements : Part II. Experimental results and computer simulation of self-aligned test structures. / Cappelletti, Paolo; Finetti, Manuela; Scorzoni, Andrea; Suni, Ilkka; Circelli, Nadia; Dalla, Libera Giovanna.

In: IEEE Transactions on Electron Devices, Vol. 34, No. 3, 1987, p. 532-536.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Current crowding and misaligment effects as sources of error in contact resistivity measurements

T2 - Part II. Experimental results and computer simulation of self-aligned test structures

AU - Cappelletti, Paolo

AU - Finetti, Manuela

AU - Scorzoni, Andrea

AU - Suni, Ilkka

AU - Circelli, Nadia

AU - Dalla, Libera Giovanna

PY - 1987

Y1 - 1987

U2 - 10.1109/T-ED.1987.22959

DO - 10.1109/T-ED.1987.22959

M3 - Article

VL - 34

SP - 532

EP - 536

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

SN - 0018-9383

IS - 3

ER -

Cappelletti P, Finetti M, Scorzoni A, Suni I, Circelli N, Dalla LG. Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures. IEEE Transactions on Electron Devices. 1987;34(3):532-536. https://doi.org/10.1109/T-ED.1987.22959

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