Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures

Paolo Cappelletti, Manuela Finetti, Andrea Scorzoni, Ilkka Suni, Nadia Circelli, Libera Giovanna Dalla

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)532-536
JournalIEEE Transactions on Electron Devices
Volume34
Issue number3
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

Cite this