Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures

Paolo Cappelletti; Manuela Finetti; Andrea Scorzoni; Ilkka Suni; Nadia Circelli; Libera Giovanna Dalla

doi:10.1109/T-ED.1987.22959

Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures

Paolo Cappelletti, Manuela Finetti, Andrea Scorzoni, Ilkka Suni, Nadia Circelli, Libera Giovanna Dalla

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

14 Citations (Scopus)

Original language	English
Pages (from-to)	532-536
Journal	IEEE Transactions on Electron Devices
Volume	34
Issue number	3
DOIs	https://doi.org/10.1109/T-ED.1987.22959
Publication status	Published - 1987
MoE publication type	A1 Journal article-refereed

Access to Document

10.1109/T-ED.1987.22959

Cite this

Cappelletti, P., Finetti, M., Scorzoni, A., Suni, I., Circelli, N., & Dalla, L. G. (1987). Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures. IEEE Transactions on Electron Devices, 34(3), 532-536. https://doi.org/10.1109/T-ED.1987.22959

Cappelletti, Paolo ; Finetti, Manuela ; Scorzoni, Andrea ; Suni, Ilkka ; Circelli, Nadia ; Dalla, Libera Giovanna. / Current crowding and misaligment effects as sources of error in contact resistivity measurements : Part II. Experimental results and computer simulation of self-aligned test structures. In: IEEE Transactions on Electron Devices. 1987 ; Vol. 34, No. 3. pp. 532-536.

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title = "Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures",

author = "Paolo Cappelletti and Manuela Finetti and Andrea Scorzoni and Ilkka Suni and Nadia Circelli and Dalla, {Libera Giovanna}",

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Cappelletti, P, Finetti, M, Scorzoni, A, Suni, I, Circelli, N & Dalla, LG 1987, 'Current crowding and misaligment effects as sources of error in contact resistivity measurements: Part II. Experimental results and computer simulation of self-aligned test structures', IEEE Transactions on Electron Devices, vol. 34, no. 3, pp. 532-536. https://doi.org/10.1109/T-ED.1987.22959

Current crowding and misaligment effects as sources of error in contact resistivity measurements : Part II. Experimental results and computer simulation of self-aligned test structures. / Cappelletti, Paolo; Finetti, Manuela; Scorzoni, Andrea; Suni, Ilkka; Circelli, Nadia; Dalla, Libera Giovanna.

In: IEEE Transactions on Electron Devices, Vol. 34, No. 3, 1987, p. 532-536.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Current crowding and misaligment effects as sources of error in contact resistivity measurements

T2 - Part II. Experimental results and computer simulation of self-aligned test structures

AU - Cappelletti, Paolo

AU - Finetti, Manuela

AU - Scorzoni, Andrea

AU - Suni, Ilkka

AU - Circelli, Nadia

AU - Dalla, Libera Giovanna

PY - 1987

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DO - 10.1109/T-ED.1987.22959

M3 - Article

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SP - 532

EP - 536

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

SN - 0018-9383

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