Current crowding and misalignment effects as sources of error in contact resistivity measurements

Part I. Computer simulation of conventional CER and CKR structures

Andrea Scorzoni, Manuela Finetti, Kaj Grahn, Ilkka Suni, Paolo Cappelletti

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

In this paper we have investigated current crowding and misalignment effects as sources of error in the extraction of the contact resistivity from contact resistance data. Computer simulations have been carried out to analyze both conventional CER and CKR structures. The extent of the errors related to such parasitic effects is discussed, with particular emphasis on the effect of current crowding in misaligned contacts, in the case where the contact geometry is not correctly taken into account.
Original languageEnglish
Pages (from-to)525-531
JournalIEEE Transactions on Electron Devices
Volume34
Issue number3
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

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Computer simulation
Contact resistance
Geometry

Cite this

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title = "Current crowding and misalignment effects as sources of error in contact resistivity measurements: Part I. Computer simulation of conventional CER and CKR structures",
abstract = "In this paper we have investigated current crowding and misalignment effects as sources of error in the extraction of the contact resistivity from contact resistance data. Computer simulations have been carried out to analyze both conventional CER and CKR structures. The extent of the errors related to such parasitic effects is discussed, with particular emphasis on the effect of current crowding in misaligned contacts, in the case where the contact geometry is not correctly taken into account.",
author = "Andrea Scorzoni and Manuela Finetti and Kaj Grahn and Ilkka Suni and Paolo Cappelletti",
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Current crowding and misalignment effects as sources of error in contact resistivity measurements : Part I. Computer simulation of conventional CER and CKR structures. / Scorzoni, Andrea; Finetti, Manuela; Grahn, Kaj; Suni, Ilkka; Cappelletti, Paolo.

In: IEEE Transactions on Electron Devices, Vol. 34, No. 3, 1987, p. 525-531.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Current crowding and misalignment effects as sources of error in contact resistivity measurements

T2 - Part I. Computer simulation of conventional CER and CKR structures

AU - Scorzoni, Andrea

AU - Finetti, Manuela

AU - Grahn, Kaj

AU - Suni, Ilkka

AU - Cappelletti, Paolo

PY - 1987

Y1 - 1987

N2 - In this paper we have investigated current crowding and misalignment effects as sources of error in the extraction of the contact resistivity from contact resistance data. Computer simulations have been carried out to analyze both conventional CER and CKR structures. The extent of the errors related to such parasitic effects is discussed, with particular emphasis on the effect of current crowding in misaligned contacts, in the case where the contact geometry is not correctly taken into account.

AB - In this paper we have investigated current crowding and misalignment effects as sources of error in the extraction of the contact resistivity from contact resistance data. Computer simulations have been carried out to analyze both conventional CER and CKR structures. The extent of the errors related to such parasitic effects is discussed, with particular emphasis on the effect of current crowding in misaligned contacts, in the case where the contact geometry is not correctly taken into account.

U2 - 10.1109/T-ED.1987.22958

DO - 10.1109/T-ED.1987.22958

M3 - Article

VL - 34

SP - 525

EP - 531

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

SN - 0018-9383

IS - 3

ER -