DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Jussi Kaasalainen, Antti Manninen

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)


    Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.
    Original languageEnglish
    Pages (from-to)2506-2511
    Number of pages6
    JournalIEEE Transactions on Instrumentation and Measurement
    Issue number7
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed


    • measurement standards
    • microelectromechanical devices
    • stability voltage


    Dive into the research topics of 'DC voltage reference based on a square-wave-actuated microelectromechanical sensor'. Together they form a unique fingerprint.

    Cite this