DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Jussi Kaasalainen, Antti Manninen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.
Original languageEnglish
Pages (from-to)2506-2511
Number of pages6
JournalIEEE Transactions on Instrumentation and Measurement
Volume60
Issue number7
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Keywords

  • measurement standards
  • microelectromechanical devices
  • stability voltage

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