DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Jussi Kaasalainen; Antti Manninen

doi:10.1109/TIM.2011.2144230

DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Jussi Kaasalainen, Antti Manninen

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.

Original language	English
Pages (from-to)	2506-2511
Number of pages	6
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	60
Issue number	7
DOIs	https://doi.org/10.1109/TIM.2011.2144230
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

Keywords

measurement standards
microelectromechanical devices
stability voltage

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10.1109/TIM.2011.2144230

Cite this

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abstract = "Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.",

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AB - Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.

KW - measurement standards

KW - microelectromechanical devices

KW - stability voltage

U2 - 10.1109/TIM.2011.2144230

DO - 10.1109/TIM.2011.2144230

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JO - IEEE Transactions on Instrumentation and Measurement

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DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Abstract

Keywords

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