DC voltage reference based on a square-wave-actuated microelectromechanical sensor

Jussi Kaasalainen, Antti Manninen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.
Original languageEnglish
Pages (from-to)2506-2511
Number of pages6
JournalIEEE Transactions on Instrumentation and Measurement
Volume60
Issue number7
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

square waves
direct current
microelectromechanical systems
MEMS
capacitors
Capacitors
sensors
Sensors
Electric potential
electric potential
actuation
charging

Keywords

  • measurement standards
  • microelectromechanical devices
  • stability voltage

Cite this

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abstract = "Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.",
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DC voltage reference based on a square-wave-actuated microelectromechanical sensor. / Kaasalainen, Jussi; Manninen, Antti.

In: IEEE Transactions on Instrumentation and Measurement, Vol. 60, No. 7, 2011, p. 2506-2511.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - DC voltage reference based on a square-wave-actuated microelectromechanical sensor

AU - Kaasalainen, Jussi

AU - Manninen, Antti

PY - 2011

Y1 - 2011

N2 - Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.

AB - Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.

KW - measurement standards

KW - microelectromechanical devices

KW - stability voltage

U2 - 10.1109/TIM.2011.2144230

DO - 10.1109/TIM.2011.2144230

M3 - Article

VL - 60

SP - 2506

EP - 2511

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

SN - 0018-9456

IS - 7

ER -