Deep plasma etching of oxides

Kai Kolari, Ari Hokkanen

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2006
    MoE publication typeNot Eligible
    EventMicrostructure Workshop 2006 - Västerås, Sweden
    Duration: 9 May 200610 May 2006

    Workshop

    WorkshopMicrostructure Workshop 2006
    CountrySweden
    CityVästerås
    Period9/05/0610/05/06

    Cite this

    Kolari, K., & Hokkanen, A. (2006). Deep plasma etching of oxides. Paper presented at Microstructure Workshop 2006, Västerås, Sweden.