Original language | English |
---|---|
Title of host publication | Handbook of Silicon Based MEMS Materials & Technologies |
Subtitle of host publication | A volume in Micro and Nano Technologies |
Editors | Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka |
Place of Publication | Amsterdam |
Publisher | Elsevier |
Chapter | 23 |
Pages | 349-374 |
ISBN (Print) | 978-0-8155-1594-4 |
DOIs | |
Publication status | Published - 2010 |
MoE publication type | A3 Part of a book or another research book |
Deep reactive ion etching
Franz Laermer, Sami Franssila, Lauri Sainiemi, Kai Kolari
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
17
Citations
(Scopus)