Deep reactive ion etching

Franz Laermer, Sami Franssila, Lauri Sainiemi, Kai Kolari

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

15 Citations (Scopus)
Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials & Technologies
EditorsVeikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
Place of PublicationNorwich, NY, USA
Chapter23
Pages349-374
DOIs
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book

Cite this