Deep reactive ion etching

Franz Laermer; Sami Franssila; Lauri Sainiemi; Kai Kolari

doi:10.1016/B978-0-8155-1594-4.00023-1

Deep reactive ion etching

Franz Laermer
, Sami Franssila
, Lauri Sainiemi
, Kai Kolari

VTT Technical Research Centre of Finland

Helsinki University of Technology
Robert Bosch GmbH

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

19 Citations (Scopus)

Original language	English
Title of host publication	Handbook of Silicon Based MEMS Materials & Technologies
Subtitle of host publication	A volume in Micro and Nano Technologies
Editors	Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
Place of Publication	Amsterdam
Publisher	Elsevier
Chapter	23
Pages	349-374
ISBN (Print)	978-0-8155-1594-4
DOIs	https://doi.org/10.1016/B978-0-8155-1594-4.00023-1
Publication status	Published - 2010
MoE publication type	A3 Part of a book or another research book

Access to Document

10.1016/B978-0-8155-1594-4.00023-1

Cite this

@inbook{1fba36d4682d47b4b852bf84dea1a88d,

title = "Deep reactive ion etching",

author = "Franz Laermer and Sami Franssila and Lauri Sainiemi and Kai Kolari",

year = "2010",

doi = "10.1016/B978-0-8155-1594-4.00023-1",

language = "English",

isbn = "978-0-8155-1594-4",

pages = "349--374",

editor = "Veikko Lindroos and Markku Tilli and Ari Lehto and Teruaki Motooka",

booktitle = "Handbook of Silicon Based MEMS Materials \& Technologies",

publisher = "Elsevier",

address = "Netherlands",

}

Deep reactive ion etching. / Laermer, Franz; Franssila, Sami; Sainiemi, Lauri et al.
Handbook of Silicon Based MEMS Materials & Technologies: A volume in Micro and Nano Technologies. ed. / Veikko Lindroos; Markku Tilli; Ari Lehto; Teruaki Motooka. Amsterdam: Elsevier, 2010. p. 349-374.

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

TY - CHAP

T1 - Deep reactive ion etching

AU - Laermer, Franz

AU - Franssila, Sami

AU - Sainiemi, Lauri

AU - Kolari, Kai

PY - 2010

Y1 - 2010

U2 - 10.1016/B978-0-8155-1594-4.00023-1

DO - 10.1016/B978-0-8155-1594-4.00023-1

M3 - Chapter or book article

SN - 978-0-8155-1594-4

SP - 349

EP - 374

BT - Handbook of Silicon Based MEMS Materials & Technologies

A2 - Lindroos, Veikko

A2 - Tilli, Markku

A2 - Lehto, Ari

A2 - Motooka, Teruaki

PB - Elsevier

CY - Amsterdam

ER -