Skip to main navigation Skip to search Skip to main content

Defect formation and annealing behavior of InP implanted by low-energy 15N ions

  • Esko Rauhala
  • , T. Ahlgren
  • , K. Väkeväinen
  • , Jyrki Räisänen
  • , J. Keinonen
  • , K. Saarinen
  • , T. Laine
  • , Jari Likonen
    • University of Helsinki
    • Helsinki University of Technology

    Research output: Contribution to journal › Article › Scientific › peer-review

    11   Link opens in a new tab Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Defect formation and annealing behavior of InP implanted by low-energy 15N ions'. Together they form a unique fingerprint.
    Sort by

    Keyphrases

    INIS

    Chemistry

    Material Science