Depth and profile control in plasma etched mems structures

Jyrki Kiihamäki, Hannu Kattelus, Sami Franssila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	10th International Conference on Solid-State Sensors and Actuators, Transducers'99
Place of Publication	Sendai
Pages	858 - 861
Publication status	Published - 1999
MoE publication type	B3 Non-refereed article in conference proceedings
Event	10th International Conference on Solid-State Sensors and Actuators, Transducers '99 - Sendai, Japan Duration: 7 Jun 1999 → 10 Jun 1999

Conference	10th International Conference on Solid-State Sensors and Actuators, Transducers '99
Country/Territory	Japan
City	Sendai
Period	7/06/99 → 10/06/99

Cite this

@inproceedings{52e6ca70bb7a4e678c2d2fbfeacfd58c,

title = "Depth and profile control in plasma etched mems structures",

author = "Jyrki Kiiham{\"a}ki and Hannu Kattelus and Sami Franssila",

year = "1999",

language = "English",

pages = "858 -- 861",

booktitle = "10th International Conference on Solid-State Sensors and Actuators, Transducers'99",

note = "10th International Conference on Solid-State Sensors and Actuators, <br/>Transducers '99 ; Conference date: 07-06-1999 Through 10-06-1999",

}

TY - GEN

T1 - Depth and profile control in plasma etched mems structures

AU - Kiihamäki, Jyrki

AU - Kattelus, Hannu

AU - Franssila, Sami

PY - 1999

Y1 - 1999

M3 - Conference article in proceedings

SP - 858

EP - 861

BT - 10th International Conference on Solid-State Sensors and Actuators, Transducers'99

CY - Sendai

T2 - 10th International Conference on Solid-State Sensors and Actuators, <br/>Transducers '99

Y2 - 7 June 1999 through 10 June 1999

ER -