Depth and profile control in plasma etched mems structures

Jyrki Kiihamäki, Hannu Kattelus, Sami Franssila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication10th International Conference on Solid-State Sensors and Actuators, Transducers'99
Place of PublicationSendai
Pages858 - 861
Publication statusPublished - 1999
MoE publication typeB3 Non-refereed article in conference proceedings
Event10th International Conference on Solid-State Sensors and Actuators,
Transducers '99
- Sendai, Japan
Duration: 7 Jun 199910 Jun 1999

Conference

Conference10th International Conference on Solid-State Sensors and Actuators,
Transducers '99
CountryJapan
CitySendai
Period7/06/9910/06/99

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