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Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

  • M. Laitinen*
  • , T. Sajavaara
  • , M. Rossi
  • , J. Julin
  • , Riikka Puurunen
  • , Tommi Suni
  • , T. Ishida
  • , H Fujita
  • , K. Arstila
  • , B. Brijs
  • , H.J. Whitlow
    • *Corresponding author for this work
  • University of Jyväskylä
  • University of Tokyo
  • Interuniversitair Micro-Electronica Centrum (IMEC)

Research output: Contribution to journal › Article › Scientific › peer-review

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