Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

M. Laitinen (Corresponding Author), T. Sajavaara, M. Rossi, J. Julin, Riikka Puurunen, Tommi Suni, T. Ishida, H Fujita, K. Arstila, B. Brijs, H.J. Whitlow

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Engineering & Materials Science

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