Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS
Alireza, M. Kia, Clemens Mart, Nora Haufe, Mikko Utriainen, Riikka L. Puurunen, Wenke Weinreich
Research output: Contribution to conference › Conference Abstract › Scientific › peer-review