Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS

Alireza, M. Kia, Clemens Mart, Nora Haufe, Mikko Utriainen, Riikka L. Puurunen, Wenke Weinreich

Research output: Contribution to conferenceConference AbstractScientificpeer-review

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Physics & Astronomy