Design and characterization of MIKES metrological atomic force microscope

Keyphrases

• MIKES 100%
• Nonlinearity 100%
• Metrological Atomic Force Microscopy 100%
• Uncertainty Estimation 50%
• Transfer Standard 50%
• Atomic Force Microscope 50%
• Methods for Detection 50%
• Laser Interferometer 50%
• Large Uncertainty 50%
• Noise Level 50%
• Uncertainty Component 50%
• External Disturbances 50%
• International Comparison 50%
• Interferometer 50%
• Microscope Measurement 50%
• Abbe Error 50%
• Sampling Location 50%
• Electrical Noise 50%
• Acoustic Noise 50%
• Online Correction 50%
• 3-axis 50%
• Z-direction 50%
• Step Height Measurement 50%
• Ambient Temperature Variation 50%
• Orthogonality Error 50%
• Z-coordinate 50%
• Scanning Probe Microscope 50%

INIS

• design 100%
• atomic force microscopy 100%
• noise 100%
• errors 50%
• nonlinear problems 50%
• interferometers 50%
• comparative evaluations 25%
• levels 25%
• height 25%
• pitches 25%
• probes 25%
• detection 25%
• ambient temperature 25%
• variations 25%
• coordinates 25%
• calibration 25%
• lasers 25%
• acoustics 25%
• corrections 25%
• microscopes 25%
• disturbances 25%

Engineering

• Atomic Force Microscope 100%
• Nonlinearity 66%
• Special Attention 33%
• External Disturbance 33%
• Laser Interferometer 33%
• Noise Level 33%
• Orthogonality 33%