Design and characterization of the MIKES metrology atomic force microscope

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.

    Original languageEnglish
    Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
    EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
    PublisherEuspen
    Pages239-242
    Number of pages4
    Volume2
    ISBN (Print)978-095530826-0
    Publication statusPublished - 1 Jan 2009
    MoE publication typeA4 Article in a conference publication
    Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
    Duration: 2 Jun 20095 Jun 2009

    Conference

    Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
    Country/TerritorySpain
    CitySan Sebastian
    Period2/06/095/06/09

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