Design and characterization of the MIKES metrology atomic force microscope

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Abstract

An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
PublisherEuspen
Pages239-242
Number of pages4
Volume2
ISBN (Print)978-095530826-0
Publication statusPublished - 1 Jan 2009
MoE publication typeA4 Article in a conference publication
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period2/06/095/06/09

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  • Cite this

    Korpelainen, V., Seppä, J., & Lassila, A. (2009). Design and characterization of the MIKES metrology atomic force microscope. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 239-242). Euspen.