Abstract
An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.
| Original language | English |
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| Title of host publication | Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 |
| Editors | Hendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke |
| Publisher | Euspen |
| Pages | 239-242 |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (Print) | 978-095530826-0 |
| Publication status | Published - 1 Jan 2009 |
| MoE publication type | A4 Article in a conference publication |
| Event | 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain Duration: 2 Jun 2009 → 5 Jun 2009 |
Conference
| Conference | 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 |
|---|---|
| Country/Territory | Spain |
| City | San Sebastian |
| Period | 2/06/09 → 5/06/09 |