Design and characterization of the MIKES metrology atomic force microscope

V. Korpelainen; J. Seppä; A. Lassila

Design and characterization of the MIKES metrology atomic force microscope

V. Korpelainen^*
, J. Seppä
, A. Lassila

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.

Original language	English
Title of host publication	Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Editors	Hendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
Publisher	Euspen
Pages	239-242
Number of pages	4
Volume	2
ISBN (Print)	978-095530826-0
Publication status	Published - 1 Jan 2009
MoE publication type	A4 Article in a conference publication
Event	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain Duration: 2 Jun 2009 → 5 Jun 2009

Conference

Conference	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Country/Territory	Spain
City	San Sebastian
Period	2/06/09 → 5/06/09

Cite this

Korpelainen, V., Seppä, J., & Lassila, A. (2009). Design and characterization of the MIKES metrology atomic force microscope. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 239-242). Euspen.

Korpelainen, V. ; Seppä, J. ; Lassila, A. / Design and characterization of the MIKES metrology atomic force microscope. Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. editor / Hendrik Van Brussel ; Theresa Burke ; H. Spaan ; E. Brinksmeier ; Theresa Burke ; Theresa Burke. Vol. 2 Euspen, 2009. pp. 239-242

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title = "Design and characterization of the MIKES metrology atomic force microscope",

abstract = "An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.",

author = "V. Korpelainen and J. Sepp{\"a} and A. Lassila",

year = "2009",

month = jan,

day = "1",

language = "English",

isbn = "978-095530826-0",

volume = "2",

pages = "239--242",

editor = "\{Van Brussel\}, Hendrik and Theresa Burke and H. Spaan and E. Brinksmeier and Theresa Burke and Theresa Burke",

booktitle = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",

publisher = "Euspen",

address = "United Kingdom",

note = "9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",

}

Korpelainen, V , Seppä, J & Lassila, A 2009, Design and characterization of the MIKES metrology atomic force microscope. in H Van Brussel, T Burke, H Spaan, E Brinksmeier, T Burke & T Burke (eds), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. vol. 2, Euspen, pp. 239-242, 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, San Sebastian, Spain, 2/06/09.

Design and characterization of the MIKES metrology atomic force microscope. / Korpelainen, V.; Seppä, J.; Lassila, A.
Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. ed. / Hendrik Van Brussel; Theresa Burke; H. Spaan; E. Brinksmeier; Theresa Burke; Theresa Burke. Vol. 2 Euspen, 2009. p. 239-242.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Design and characterization of the MIKES metrology atomic force microscope

AU - Korpelainen, V.

AU - Seppä, J.

AU - Lassila, A.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.

AB - An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.

UR - https://www.scopus.com/pages/publications/84908151159

M3 - Conference article in proceedings

AN - SCOPUS:84908151159

SN - 978-095530826-0

VL - 2

SP - 239

EP - 242

BT - Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

A2 - Van Brussel, Hendrik

A2 - Burke, Theresa

A2 - Spaan, H.

A2 - Brinksmeier, E.

A2 - Burke, Theresa

PB - Euspen

T2 - 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Y2 - 2 June 2009 through 5 June 2009

ER -

Design and characterization of the MIKES metrology atomic force microscope

Abstract

Conference

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