Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Cyril Karuthedath, Abhilash Thanniyil Sebastian, Jaakko Saarilahti, Teuvo Sillanpää, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

    6 Citations (Scopus)

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