Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Cyril Karuthedath, Abhilash Thanniyil Sebastian, Jaakko Saarilahti, Teuvo Sillanpää, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Equipment

OtaNano

VTT Technical Research Centre of Finland

Facility/equipment: Facility