Design and fabrication of individualized capacitive microsensor for tilt measurement

K. Cyril Baby, Norbert Schwesinger

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)


This paper discusses details of a capacitance based tilt microsensor. The microsensor is a miniature version of a previously reported imperfect sensor [1]. A simple, cost effective and rapid process for microsensor fabrication is developed. The microsensor consists of two layers of Conductive PolyDiMethylSiloxane (CPDMS) membranes that are stacked together to form the structural element. Steel balls on the CPDMS membrane increase the mass of the system, thereby improving its sensitivity. The steel balls are randomly distributed, which makes each sensor individual and unique. Capacitive electrodes are etched on a double sided Printed Circuit Board (PCB). Two electrode configurations, single and dual, are designed to convert the movement of the membrane into a change in capacitance. Compared to the previously reported sensor [1], the newly designed microsensor offers better sensitivity at a reduced size.

Original languageEnglish
Title of host publication2015 IEEE SENSORS - Proceedings
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-4799-8203-5
ISBN (Print)978-1-4799-8202-8
Publication statusPublished - 31 Dec 2015
MoE publication typeA4 Article in a conference publication
Event14th IEEE SENSORS - Busan, Korea, Republic of
Duration: 1 Nov 20154 Nov 2015


Conference14th IEEE SENSORS
Country/TerritoryKorea, Republic of


  • capacitive sensing
  • conductive PDMS
  • sensor fabrication
  • single and dual electrode configuration
  • tilt measurement


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