Abstract
This paper discusses details of a capacitance based tilt microsensor. The microsensor is a miniature version of a previously reported imperfect sensor [1]. A simple, cost effective and rapid process for microsensor fabrication is developed. The microsensor consists of two layers of Conductive PolyDiMethylSiloxane (CPDMS) membranes that are stacked together to form the structural element. Steel balls on the CPDMS membrane increase the mass of the system, thereby improving its sensitivity. The steel balls are randomly distributed, which makes each sensor individual and unique. Capacitive electrodes are etched on a double sided Printed Circuit Board (PCB). Two electrode configurations, single and dual, are designed to convert the movement of the membrane into a change in capacitance. Compared to the previously reported sensor [1], the newly designed microsensor offers better sensitivity at a reduced size.
| Original language | English |
|---|---|
| Title of host publication | 2015 IEEE SENSORS - Proceedings |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| ISBN (Electronic) | 978-1-4799-8203-5 |
| ISBN (Print) | 978-1-4799-8202-8 |
| DOIs | |
| Publication status | Published - 31 Dec 2015 |
| MoE publication type | A4 Article in a conference publication |
| Event | 14th IEEE SENSORS - Busan, Korea, Republic of Duration: 1 Nov 2015 → 4 Nov 2015 |
Conference
| Conference | 14th IEEE SENSORS |
|---|---|
| Country/Territory | Korea, Republic of |
| City | Busan |
| Period | 1/11/15 → 4/11/15 |
Keywords
- capacitive sensing
- conductive PDMS
- sensor fabrication
- single and dual electrode configuration
- tilt measurement