Design and optimization of reconfigurable reflectarray element with MEMS phase shifter

Keyphrases

• MEMS Phase Shifter 100%
• Reconfigurable Reflectarray 100%
• Reflectarray Element 100%
• Design Process 50%
• Phase Shifter 50%
• Design Parameters 50%
• Process Optimization 50%
• MEMS-based 50%
• Proper Design 50%
• Dielectric Properties 50%
• On-wafer Measurement 50%
• Array Element 50%
• SU-8 50%
• SU-8 Photoresist 50%

Engineering

• Microelectromechanical System 100%
• Phase Shifters 100%
• Reflectarray 100%
• Design Parameter 50%
• Proper Design 50%
• Array Element 50%
• Dielectrics 50%
• Photoresist 50%

INIS

• design 100%
• optimization 100%
• efficiency 50%
• substrates 50%
• ghz range 25%
• dielectric properties 25%