Design fabrication and packaging of micro-optical components and systems

Harri Kopola; Jussi Hiltunen; Ari Kärkkäinen; Pentti Karioja; Janne Paaso; Juha Rantala

doi:10.1109/OMEMS.2000.879648

Design fabrication and packaging of micro-optical components and systems

Harri Kopola, Jussi Hiltunen, Ari Kärkkäinen, Pentti Karioja, Janne Paaso, Juha Rantala

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	2000 IEEE/LEOS International Conference on Optical MEMS
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	105-106
ISBN (Print)	0-7803-6257-8
DOIs	https://doi.org/10.1109/OMEMS.2000.879648
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMS - Kauai, United States Duration: 21 Aug 2000 → 24 Aug 2000

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Kauai
Period	21/08/00 → 24/08/00

Keywords

fabrication
microoptics
optical transmitters
optical materials

Access to Document

10.1109/OMEMS.2000.879648

Cite this

@inproceedings{a074755eb47b497e9a0be5451c88143e,

title = "Design fabrication and packaging of micro-optical components and systems",

keywords = "fabrication, microoptics, optical transmitters, optical materials",

author = "Harri Kopola and Jussi Hiltunen and Ari K{\"a}rkk{\"a}inen and Pentti Karioja and Janne Paaso and Juha Rantala",

year = "2000",

doi = "10.1109/OMEMS.2000.879648",

language = "English",

isbn = "0-7803-6257-8",

pages = "105--106",

booktitle = "2000 IEEE/LEOS International Conference on Optical MEMS",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMS ; Conference date: 21-08-2000 Through 24-08-2000",

}

Kopola, H, Hiltunen, J, Kärkkäinen, A, Karioja, P, Paaso, J & Rantala, J 2000, Design fabrication and packaging of micro-optical components and systems. in 2000 IEEE/LEOS International Conference on Optical MEMS. IEEE Institute of Electrical and Electronic Engineers, pp. 105-106, IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, United States, 21/08/00. https://doi.org/10.1109/OMEMS.2000.879648

Design fabrication and packaging of micro-optical components and systems. / Kopola, Harri; Hiltunen, Jussi; Kärkkäinen, Ari et al.
2000 IEEE/LEOS International Conference on Optical MEMS. IEEE Institute of Electrical and Electronic Engineers, 2000. p. 105-106.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Design fabrication and packaging of micro-optical components and systems

AU - Kopola, Harri

AU - Hiltunen, Jussi

AU - Kärkkäinen, Ari

AU - Karioja, Pentti

AU - Paaso, Janne

AU - Rantala, Juha

PY - 2000

Y1 - 2000

KW - fabrication

KW - microoptics

KW - optical transmitters

KW - optical materials

U2 - 10.1109/OMEMS.2000.879648

DO - 10.1109/OMEMS.2000.879648

M3 - Conference article in proceedings

SN - 0-7803-6257-8

SP - 105

EP - 106

BT - 2000 IEEE/LEOS International Conference on Optical MEMS

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE/LEOS International Conference on Optical MEMS

Y2 - 21 August 2000 through 24 August 2000

ER -