Design of a calibration machine for optical two-dimensional length standards

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

Original languageEnglish
Title of host publicationOptomechatronic Systems III
PublisherInternational Society for Optics and Photonics SPIE
Pages670-678
Number of pages9
DOIs
Publication statusPublished - 1 Dec 2002
MoE publication typeA4 Article in a conference publication
EventOptomechatronic Systems III - Stuttgart, Germany
Duration: 12 Nov 200214 Nov 2002

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume4902
ISSN0277-786X

Conference

ConferenceOptomechatronic Systems III
CountryGermany
CityStuttgart
Period12/11/0214/11/02

Fingerprint

Calibration
Uncertainty Analysis
Optical Measurement
Mechanical Design
Optical Sensor
Metrology
Position measurement
Accreditation
Uncertainty analysis
Optical sensors
optical measuring instruments
optical measurement
Industry
metrology
Uncertainty
industries
Modeling
Standards
Design

Keywords

  • 2D coordinate measurements
  • Calibration
  • Two-dimensional standard

Cite this

Hemming, B., Palosuo, I., & Lassila, A. (2002). Design of a calibration machine for optical two-dimensional length standards. In Optomechatronic Systems III (pp. 670-678). International Society for Optics and Photonics SPIE. Proceedings of SPIE - The International Society for Optical Engineering, Vol.. 4902 https://doi.org/10.1117/12.467631
Hemming, Björn ; Palosuo, Ilkka ; Lassila, Antti. / Design of a calibration machine for optical two-dimensional length standards. Optomechatronic Systems III. International Society for Optics and Photonics SPIE, 2002. pp. 670-678 (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4902).
@inproceedings{f0bbc1acb6ce433ea3fb317ce5dec602,
title = "Design of a calibration machine for optical two-dimensional length standards",
abstract = "Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.",
keywords = "2D coordinate measurements, Calibration, Two-dimensional standard",
author = "Bj{\"o}rn Hemming and Ilkka Palosuo and Antti Lassila",
year = "2002",
month = "12",
day = "1",
doi = "10.1117/12.467631",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "International Society for Optics and Photonics SPIE",
pages = "670--678",
booktitle = "Optomechatronic Systems III",
address = "United States",

}

Hemming, B, Palosuo, I & Lassila, A 2002, Design of a calibration machine for optical two-dimensional length standards. in Optomechatronic Systems III. International Society for Optics and Photonics SPIE, Proceedings of SPIE - The International Society for Optical Engineering, vol. 4902, pp. 670-678, Optomechatronic Systems III, Stuttgart, Germany, 12/11/02. https://doi.org/10.1117/12.467631

Design of a calibration machine for optical two-dimensional length standards. / Hemming, Björn; Palosuo, Ilkka; Lassila, Antti.

Optomechatronic Systems III. International Society for Optics and Photonics SPIE, 2002. p. 670-678 (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4902).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Design of a calibration machine for optical two-dimensional length standards

AU - Hemming, Björn

AU - Palosuo, Ilkka

AU - Lassila, Antti

PY - 2002/12/1

Y1 - 2002/12/1

N2 - Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

AB - Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

KW - 2D coordinate measurements

KW - Calibration

KW - Two-dimensional standard

UR - http://www.scopus.com/inward/record.url?scp=0036980694&partnerID=8YFLogxK

U2 - 10.1117/12.467631

DO - 10.1117/12.467631

M3 - Conference article in proceedings

AN - SCOPUS:0036980694

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 670

EP - 678

BT - Optomechatronic Systems III

PB - International Society for Optics and Photonics SPIE

ER -

Hemming B, Palosuo I, Lassila A. Design of a calibration machine for optical two-dimensional length standards. In Optomechatronic Systems III. International Society for Optics and Photonics SPIE. 2002. p. 670-678. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4902). https://doi.org/10.1117/12.467631