Design of a calibration machine for optical two-dimensional length standards

Björn Hemming*, Ilkka Palosuo, Antti Lassila

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

    Original languageEnglish
    Title of host publicationOptomechatronic Systems III
    PublisherInternational Society for Optics and Photonics SPIE
    Pages670-678
    DOIs
    Publication statusPublished - 1 Dec 2002
    MoE publication typeA4 Article in a conference publication
    EventOptomechatronic Systems III - Stuttgart, Germany
    Duration: 12 Nov 200214 Nov 2002

    Publication series

    SeriesProceedings of SPIE
    Volume4902
    ISSN0277-786X

    Conference

    ConferenceOptomechatronic Systems III
    Country/TerritoryGermany
    CityStuttgart
    Period12/11/0214/11/02

    Keywords

    • 2D coordinate measurements
    • Calibration
    • Two-dimensional standard

    Fingerprint

    Dive into the research topics of 'Design of a calibration machine for optical two-dimensional length standards'. Together they form a unique fingerprint.

    Cite this