Design of a calibration machine for optical two-dimensional length standards

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3 Citations (Scopus)

Abstract

Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

Original languageEnglish
Title of host publicationOptomechatronic Systems III
PublisherInternational Society for Optics and Photonics SPIE
Pages670-678
DOIs
Publication statusPublished - 1 Dec 2002
MoE publication typeA4 Article in a conference publication
EventOptomechatronic Systems III - Stuttgart, Germany
Duration: 12 Nov 200214 Nov 2002

Publication series

SeriesProceedings of SPIE
Volume4902
ISSN0277-786X

Conference

ConferenceOptomechatronic Systems III
CountryGermany
CityStuttgart
Period12/11/0214/11/02

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Keywords

  • 2D coordinate measurements
  • Calibration
  • Two-dimensional standard

Cite this

Hemming, B., Palosuo, I., & Lassila, A. (2002). Design of a calibration machine for optical two-dimensional length standards. In Optomechatronic Systems III (pp. 670-678). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4902 https://doi.org/10.1117/12.467631