@inproceedings{f0bbc1acb6ce433ea3fb317ce5dec602,
title = "Design of a calibration machine for optical two-dimensional length standards",
abstract = "Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μn and 5 μn, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.",
keywords = "2D coordinate measurements, Calibration, Two-dimensional standard",
author = "Bj{\"o}rn Hemming and Ilkka Palosuo and Antti Lassila",
year = "2002",
month = dec,
day = "1",
doi = "10.1117/12.467631",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "670--678",
booktitle = "Optomechatronic Systems III",
address = "United States",
note = "Optomechatronic Systems III ; Conference date: 12-11-2002 Through 14-11-2002",
}