Design, packaging and reliability aspects of RF MEMS circuits fabricated using a GaAs MMIC foundry process technology

C. Malmqvist, C. Samuelsson, W. Simon, Pekka Rantakari, D. Smith, Manu Lahdes, Markku Lahti, Tauno Vähä-Heikkilä, Jussi Varis, R. Baggen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

19 Citations (Scopus)

Abstract

In this paper, we report on recent results obtained within a pan-European research effort aiming at a successful integration of RF MEMS switches in a GaAs MMIC foundry process technology. Testing and characterization of GaAs based MEMS switches and RF circuits show promising results with respect to switch cycling tests, micro-seconds switching times and the relatively low losses demonstrated up to millimetre-wave frequencies. Compact GaAs RF MEMS based phase shifters together with a possible packaging solution are also presented.
Original languageEnglish
Title of host publicationThe 40th European Microwave Conference
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages85-88
ISBN (Electronic)978-2-87487-016-3
ISBN (Print)978-1-4244-7232-1
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event40th European Microwave Conference, EuMC 2010 - Paris, France
Duration: 28 Sep 201030 Sep 2010
Conference number: 40

Conference

Conference40th European Microwave Conference, EuMC 2010
Abbreviated titleEuMC 2010
CountryFrance
CityParis
Period28/09/1030/09/10

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Keywords

  • MMICs, phase shifters, radio frequency, microelectromechanical systems (RF MEMS), switches

Cite this

Malmqvist, C., Samuelsson, C., Simon, W., Rantakari, P., Smith, D., Lahdes, M., Lahti, M., Vähä-Heikkilä, T., Varis, J., & Baggen, R. (2010). Design, packaging and reliability aspects of RF MEMS circuits fabricated using a GaAs MMIC foundry process technology. In The 40th European Microwave Conference (pp. 85-88). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.23919/EUMC.2010.5616523