Design, packaging and reliability aspects of RF MEMS circuits fabricated using a GaAs MMIC foundry process technology

C. Malmqvist, C. Samuelsson, W. Simon, Pekka Rantakari, D. Smith, Manu Lahdes, Markku Lahti, Tauno Vähä-Heikkilä, Jussi Varis, R. Baggen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    19 Citations (Scopus)

    Abstract

    In this paper, we report on recent results obtained within a pan-European research effort aiming at a successful integration of RF MEMS switches in a GaAs MMIC foundry process technology. Testing and characterization of GaAs based MEMS switches and RF circuits show promising results with respect to switch cycling tests, micro-seconds switching times and the relatively low losses demonstrated up to millimetre-wave frequencies. Compact GaAs RF MEMS based phase shifters together with a possible packaging solution are also presented.
    Original languageEnglish
    Title of host publicationThe 40th European Microwave Conference
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages85-88
    ISBN (Electronic)978-2-87487-016-3
    ISBN (Print)978-1-4244-7232-1
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event40th European Microwave Conference, EuMC 2010 - Paris, France
    Duration: 28 Sep 201030 Sep 2010
    Conference number: 40

    Conference

    Conference40th European Microwave Conference, EuMC 2010
    Abbreviated titleEuMC 2010
    CountryFrance
    CityParis
    Period28/09/1030/09/10

    Keywords

    • MMICs, phase shifters, radio frequency, microelectromechanical systems (RF MEMS), switches

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