Abstract
This work analyses the performance of passive devices designed for the frequency range of 110-330 GHz using integrated passive device technology based on a silicon substrate. The investigated designs include microstrip (MS), coplanar waveguide (CPW), grounded coplanar waveguide (GCPW) transmission lines of various lengths, as well as three single-element microstrip patch antennas designed at 166, 234 and 302 GHz, respectively. Different designs are studied using both simulations and on-wafer measurements. Ground-signal-ground (GSG) radio frequency probes with 100-μm pitch are used to measure both transmission lines and antenna structures. Measurements show that the CPW line has the lowest insertion loss among all studied transmission lines. Placing vias in different arrangements in the GCPW line shows limited effects up to 220 GHz. The antenna structures highlighted the significance of proper material modelling for the frequency response. Due to measurement setup limitations, only the impedance matching of the antennas is measured.
| Original language | English |
|---|---|
| Title of host publication | IEEE 75th Electronic Components and Technology Conference, ECTC 2025 |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 1426-1433 |
| Number of pages | 8 |
| ISBN (Electronic) | 9798331539320 |
| ISBN (Print) | 979-8-3315-3933-7 |
| DOIs | |
| Publication status | Published - 2025 |
| MoE publication type | A4 Article in a conference publication |
| Event | 75th IEEE Electronic Components and Technology Conference, ECTC 2025 - Dallas, United States Duration: 27 May 2025 → 30 May 2025 |
Conference
| Conference | 75th IEEE Electronic Components and Technology Conference, ECTC 2025 |
|---|---|
| Country/Territory | United States |
| City | Dallas |
| Period | 27/05/25 → 30/05/25 |
Funding
This work was supported by Business Finland through the RF Sampo project (grant no. 2993/31/2021) and the TeraFront project (grant no. 8398/31/2022), and in part by 6G Flagship (grant no. 369116) funded by the Research Council of Finland. Okmetic is acknowledged for supplying the used Si wafers. Keysight Inc. has supported the research by donating measurement equipment.
Keywords
- 6G
- IPD technology
- microstrip patch antennas
- sub-THz
- transmission line
- via transition
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