Designing capacitively coupled microelectromechanical filters

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings - IEEE Ultrasonics Symposium 2005
Pages	1588-1591
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603164
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium - Rotterdam, Netherlands Duration: 18 Sep 2005 → 21 Sep 2005

@inproceedings{64ff24f1114047f4b8122d34ba271b32,

title = "Designing capacitively coupled microelectromechanical filters",

author = "A.T. Alastalo and V. Kaajakari",

year = "2005",

doi = "10.1109/ULTSYM.2005.1603164",

language = "English",

isbn = "0-7803-9382-1",

pages = "1588--1591",

booktitle = "Proceedings - IEEE Ultrasonics Symposium 2005",

note = "IEEE Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",

}

TY - GEN

T1 - Designing capacitively coupled microelectromechanical filters

AU - Alastalo, A.T.

AU - Kaajakari, V.

PY - 2005

Y1 - 2005

U2 - 10.1109/ULTSYM.2005.1603164

DO - 10.1109/ULTSYM.2005.1603164

M3 - Conference article in proceedings

SN - 0-7803-9382-1

SP - 1588

EP - 1591

BT - Proceedings - IEEE Ultrasonics Symposium 2005

T2 - IEEE Ultrasonics Symposium

Y2 - 18 September 2005 through 21 September 2005

ER -