Designing capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings - IEEE Ultrasonics Symposium 2005
    Pages1588-1591
    Number of pages4
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium - Rotterdam, Netherlands
    Duration: 18 Sep 200521 Sep 2005

    Conference

    ConferenceIEEE Ultrasonics Symposium
    CountryNetherlands
    CityRotterdam
    Period18/09/0521/09/05

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