Designing capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium 2005
Pages1588-1591
Number of pages4
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 18 Sep 200521 Sep 2005

Conference

ConferenceIEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period18/09/0521/09/05

Cite this

Alastalo, A. T., & Kaajakari, V. (2005). Designing capacitively coupled microelectromechanical filters. In Proceedings - IEEE Ultrasonics Symposium 2005 (pp. 1588-1591) https://doi.org/10.1109/ULTSYM.2005.1603164