Designing capacitively coupled microelectromechanical filters

Ari T. Alastalo, Ville Kaajakari

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationIEEE Ultrasonics Symposium 2005
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1588-1591
    ISBN (Print)978-0-7803-9382-0
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium - Rotterdam, Netherlands
    Duration: 18 Sept 200521 Sept 2005

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium
    Volume2005
    ISSN1051-0117

    Conference

    ConferenceIEEE Ultrasonics Symposium
    Country/TerritoryNetherlands
    CityRotterdam
    Period18/09/0521/09/05

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