@inproceedings{64ff24f1114047f4b8122d34ba271b32,
title = "Designing capacitively coupled microelectromechanical filters",
author = "Alastalo, \{Ari T.\} and Ville Kaajakari",
year = "2005",
doi = "10.1109/ULTSYM.2005.1603164",
language = "English",
isbn = "978-0-7803-9382-0",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "1588--1591",
booktitle = "IEEE Ultrasonics Symposium 2005",
address = "United States",
note = "IEEE Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",
}