Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

A. Boersma; Renz J. van Ee; Ralph S.A. Stevens; Milan Saalmink; Martin D.B. Charlton; Michael E. Pollard; Ruiqi Chen; Ville Kontturi; Pentti Karioja; Teemu Alajoki

doi:10.1117/12.2052558

Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

A. Boersma, Renz J. van Ee, Ralph S.A. Stevens, Milan Saalmink, Martin D.B. Charlton, Michael E. Pollard, Ruiqi Chen, Ville Kontturi, Pentti Karioja, Teemu Alajoki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.

Original language	English
Title of host publication	Proceedings Optical Sensing and Detection III
Editors	Francis Berghmans, Anna G. Mignani, Piet de Moor
Publisher	International Society for Optics and Photonics SPIE
ISBN (Print)	978-1-6284-1089-1
DOIs	https://doi.org/10.1117/12.2052558
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	SPIE Photonics Europe, Optical Sensing and Detection III - Brussels, Belgium Duration: 14 Apr 2014 → 17 Apr 2014

Publication series

Series	Proceedings of SPIE
Volume	9141
ISSN	0277-786X

Conference

Conference	SPIE Photonics Europe, Optical Sensing and Detection III
Country/Territory	Belgium
City	Brussels
Period	14/04/14 → 17/04/14

Keywords

e-beam processing
formaldehyde
gas sensors
nano-imprint lithography
photonic crystals

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10.1117/12.2052558

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Boersma, A., van Ee, R. J., Stevens, R. S. A., Saalmink, M., Charlton, M. D. B., Pollard, M. E., Chen, R., Kontturi, V., Karioja, P., & Alajoki, T. (2014). Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. In F. Berghmans, A. G. Mignani, & P. de Moor (Eds.), Proceedings Optical Sensing and Detection III Article 91410F International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2052558

Boersma, A. ; van Ee, Renz J. ; Stevens, Ralph S.A. et al. / Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. Proceedings Optical Sensing and Detection III. editor / Francis Berghmans ; Anna G. Mignani ; Piet de Moor. International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 9141).

@inproceedings{d7ed760dadad4b609ee9d965db8ca442,

title = "Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material",

abstract = "This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.",

keywords = "e-beam processing, formaldehyde, gas sensors, nano-imprint lithography, photonic crystals",

author = "A. Boersma and {van Ee}, {Renz J.} and Stevens, {Ralph S.A.} and Milan Saalmink and Charlton, {Martin D.B.} and Pollard, {Michael E.} and Ruiqi Chen and Ville Kontturi and Pentti Karioja and Teemu Alajoki",

year = "2014",

doi = "10.1117/12.2052558",

language = "English",

isbn = "978-1-6284-1089-1",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

editor = "Francis Berghmans and Mignani, {Anna G.} and {de Moor}, Piet",

booktitle = "Proceedings Optical Sensing and Detection III",

address = "United States",

note = "SPIE Photonics Europe, Optical Sensing and Detection III ; Conference date: 14-04-2014 Through 17-04-2014",

}

Boersma, A, van Ee, RJ, Stevens, RSA, Saalmink, M, Charlton, MDB, Pollard, ME, Chen, R, Kontturi, V, Karioja, P & Alajoki, T 2014, Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. in F Berghmans, AG Mignani & P de Moor (eds), Proceedings Optical Sensing and Detection III., 91410F, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9141, SPIE Photonics Europe, Optical Sensing and Detection III, Brussels, Belgium, 14/04/14. https://doi.org/10.1117/12.2052558

Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. / Boersma, A.; van Ee, Renz J.; Stevens, Ralph S.A. et al.
Proceedings Optical Sensing and Detection III. ed. / Francis Berghmans; Anna G. Mignani; Piet de Moor. International Society for Optics and Photonics SPIE, 2014. 91410F (Proceedings of SPIE, Vol. 9141).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

AU - Boersma, A.

AU - van Ee, Renz J.

AU - Stevens, Ralph S.A.

AU - Saalmink, Milan

AU - Charlton, Martin D.B.

AU - Pollard, Michael E.

AU - Chen, Ruiqi

AU - Kontturi, Ville

AU - Karioja, Pentti

AU - Alajoki, Teemu

PY - 2014

Y1 - 2014

N2 - This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.

AB - This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.

KW - e-beam processing

KW - formaldehyde

KW - gas sensors

KW - nano-imprint lithography

KW - photonic crystals

U2 - 10.1117/12.2052558

DO - 10.1117/12.2052558

M3 - Conference article in proceedings

SN - 978-1-6284-1089-1

T3 - Proceedings of SPIE

BT - Proceedings Optical Sensing and Detection III

A2 - Berghmans, Francis

A2 - Mignani, Anna G.

A2 - de Moor, Piet

PB - International Society for Optics and Photonics SPIE

T2 - SPIE Photonics Europe, Optical Sensing and Detection III

Y2 - 14 April 2014 through 17 April 2014

ER -

Boersma A, van Ee RJ, Stevens RSA, Saalmink M, Charlton MDB, Pollard ME et al. Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. In Berghmans F, Mignani AG, de Moor P, editors, Proceedings Optical Sensing and Detection III. International Society for Optics and Photonics SPIE. 2014. 91410F. (Proceedings of SPIE, Vol. 9141). doi: 10.1117/12.2052558

Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

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