Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

A. Boersma, R.J. Van Ee, R.S.A Stevens, M. Saalmink, M.D.B Charlton, M.E. Pollard, R. Chen, V. Kontturi, Pentti Karioja, T. Alajoki

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.
Original languageEnglish
Title of host publicationProceedings Optical Sensing and Detection III, volume 9141, 2014
PublisherInternational Society for Optics and Photonics SPIE
Volume9141
ISBN (Print)978-162841089-1
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe, Optical Sensing and Detection III - Brussels, Belgium
Duration: 14 Apr 201417 Apr 2014

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume9141
ISSN (Print)0277-786X

Conference

ConferenceSPIE Photonics Europe, Optical Sensing and Detection III
CountryBelgium
CityBrussels
Period14/04/1417/04/14

Fingerprint

formaldehyde
low concentrations
photonics
refractivity
sensors
polymers
gases
crystals
lithography
platforms
silicon
resins
nanocomposites
slabs
etching
electron beams
silicon dioxide
waveguides
coatings
nanoparticles

Keywords

  • e-beam processing
  • formaldehyde
  • gas sensors
  • nano-imprint lithography
  • photonic crystals

Cite this

Boersma, A., Van Ee, R. J., Stevens, R. S. A., Saalmink, M., Charlton, M. D. B., Pollard, M. E., ... Alajoki, T. (2014). Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. In Proceedings Optical Sensing and Detection III, volume 9141, 2014 (Vol. 9141). [91410F] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9141 https://doi.org/10.1117/12.2052558
Boersma, A. ; Van Ee, R.J. ; Stevens, R.S.A ; Saalmink, M. ; Charlton, M.D.B ; Pollard, M.E. ; Chen, R. ; Kontturi, V. ; Karioja, Pentti ; Alajoki, T. / Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. Proceedings Optical Sensing and Detection III, volume 9141, 2014. Vol. 9141 International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 9141).
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author = "A. Boersma and {Van Ee}, R.J. and R.S.A Stevens and M. Saalmink and M.D.B Charlton and M.E. Pollard and R. Chen and V. Kontturi and Pentti Karioja and T. Alajoki",
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Boersma, A, Van Ee, RJ, Stevens, RSA, Saalmink, M, Charlton, MDB, Pollard, ME, Chen, R, Kontturi, V, Karioja, P & Alajoki, T 2014, Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. in Proceedings Optical Sensing and Detection III, volume 9141, 2014. vol. 9141, 91410F, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9141, SPIE Photonics Europe, Optical Sensing and Detection III, Brussels, Belgium, 14/04/14. https://doi.org/10.1117/12.2052558

Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. / Boersma, A.; Van Ee, R.J.; Stevens, R.S.A; Saalmink, M.; Charlton, M.D.B; Pollard, M.E.; Chen, R.; Kontturi, V.; Karioja, Pentti; Alajoki, T.

Proceedings Optical Sensing and Detection III, volume 9141, 2014. Vol. 9141 International Society for Optics and Photonics SPIE, 2014. 91410F (Proceedings of SPIE, Vol. 9141).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Boersma, A.

AU - Van Ee, R.J.

AU - Stevens, R.S.A

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AU - Charlton, M.D.B

AU - Pollard, M.E.

AU - Chen, R.

AU - Kontturi, V.

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N2 - This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.

AB - This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor.

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DO - 10.1117/12.2052558

M3 - Conference article in proceedings

SN - 978-162841089-1

VL - 9141

T3 - Proceedings of SPIE

BT - Proceedings Optical Sensing and Detection III, volume 9141, 2014

PB - International Society for Optics and Photonics SPIE

ER -

Boersma A, Van Ee RJ, Stevens RSA, Saalmink M, Charlton MDB, Pollard ME et al. Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material. In Proceedings Optical Sensing and Detection III, volume 9141, 2014. Vol. 9141. International Society for Optics and Photonics SPIE. 2014. 91410F. (Proceedings of SPIE, Vol. 9141). https://doi.org/10.1117/12.2052558