Abstract
Diffusion of deuterium in diamondlike carbon films with different Si contents deposited by a pulsed arc discharge method in deuterium atmosphere was studied. The concentration profiles of D were measured by secondary-ion-mass spectrometry and elastic-recoil-detection techniques. A model is proposed to describe the experimental depth profiles. Diffusion, detrapping, and trapping of D were taken into account in this model. Diffusion coefficients obtained for nontrapped D resulted in activation energies of 1.5±0.2, 0.7±0.2, 0.6±0.2, and 1.2±0.2 eV for samples containing 0, 6, 15, and 33 at.% of Si, respectively.
Original language | English |
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Article number | 045406 |
Number of pages | 7 |
Journal | Physical Review B: Condensed Matter and Materials Physics |
Volume | 63 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2001 |
MoE publication type | A1 Journal article-refereed |