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Deuterium diffusion in silicon-doped diamondlike carbon films

  • E. Vainonen-Ahlgren*
  • , T. Ahlgren
  • , Jari Likonen
  • , Sari Lehto
  • , T. Sajavaara
  • , W. Rydman
  • , J. Keinonen
  • , C. Wu
  • *Corresponding author for this work
    • University of Helsinki
    • VTT (former employee or external)
    • Max-Planck-Institut für Plasmaphysik (IPP)

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    Diffusion of deuterium in diamondlike carbon films with different Si contents deposited by a pulsed arc discharge method in deuterium atmosphere was studied. The concentration profiles of D were measured by secondary-ion-mass spectrometry and elastic-recoil-detection techniques. A model is proposed to describe the experimental depth profiles. Diffusion, detrapping, and trapping of D were taken into account in this model. Diffusion coefficients obtained for nontrapped D resulted in activation energies of 1.5±0.2, 0.7±0.2, 0.6±0.2, and 1.2±0.2 eV for samples containing 0, 6, 15, and 33 at.% of Si, respectively.
    Original languageEnglish
    Article number045406
    Number of pages7
    JournalPhysical Review B - Condensed Matter and Materials Physics
    Volume63
    Issue number4
    DOIs
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

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