Development and Characterization of PMUTs using Enchanced C-SOI Wafers
- Cyril Karuthedath
- , T.S. Abhilash
- , Teuvo Sillanpää
- , Juha Larismaa
- , Katja Parkkinen
- Okmetic Oy
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific