Development of multi-step processing in silicon-on-insulator for optical waveguide applications

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Abstract

    Multi-step processing for the silicon-on-insulator (SOI) platform was developed. It allows the realisation of additional levels to basic microphotonic structures, so that waveguides with different cross-sections can be combined. The concept is based on simple process steps, which are easily scalable for mass-production. The developed processes were tested with different optical structures
    Original languageEnglish
    Title of host publicationEuropean Optical Society Topical Meeting on Optical Microsystems, OµS'05
    Subtitle of host publicationBook of Abstracts
    Publication statusPublished - 2005
    EventEuropean Optical Society Topical Meeting on Optical Microsystem, OMS '05 - Capri, Italy
    Duration: 15 Sep 200518 Sep 2005

    Conference

    ConferenceEuropean Optical Society Topical Meeting on Optical Microsystem, OMS '05
    CountryItaly
    CityCapri
    Period15/09/0518/09/05

    Keywords

    • integrated optics
    • optical device fabrication
    • optical waveguides
    • silicon on insulator technology

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  • Cite this

    Solehmainen, K., Aalto, T., Dekker, J., Kapulainen, M., Harjanne, M., & Heimala, P. (2005). Development of multi-step processing in silicon-on-insulator for optical waveguide applications. In European Optical Society Topical Meeting on Optical Microsystems, OµS'05: Book of Abstracts [111]