Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Kimmo Solehmainen; Timo Aalto; James Dekker; Markku Kapulainen; Mikko Harjanne; Päivi Heimala

Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Kimmo Solehmainen, Timo Aalto, James Dekker, Markku Kapulainen, Mikko Harjanne, Päivi Heimala

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Abstract

Multi-step processing for the silicon-on-insulator (SOI) platform was developed. It allows the realisation of additional levels to basic microphotonic structures, so that waveguides with different cross-sections can be combined. The concept is based on simple process steps, which are easily scalable for mass-production. The developed processes were tested with different optical structures

Original language	English
Title of host publication	European Optical Society Topical Meeting on Optical Microsystems, OµS'05
Subtitle of host publication	Book of Abstracts
Publication status	Published - 2005
Event	European Optical Society Topical Meeting on Optical Microsystem, OMS '05 - Capri, Italy Duration: 15 Sept 2005 → 18 Sept 2005

Conference

Conference	European Optical Society Topical Meeting on Optical Microsystem, OMS '05
Country/Territory	Italy
City	Capri
Period	15/09/05 → 18/09/05

Keywords

integrated optics
optical device fabrication
optical waveguides
silicon on insulator technology

Cite this

@inbook{17a7e224d5fb4fb4accc867e1589fc84,

title = "Development of multi-step processing in silicon-on-insulator for optical waveguide applications",

abstract = "Multi-step processing for the silicon-on-insulator (SOI) platform was developed. It allows the realisation of additional levels to basic microphotonic structures, so that waveguides with different cross-sections can be combined. The concept is based on simple process steps, which are easily scalable for mass-production. The developed processes were tested with different optical structures",

keywords = "integrated optics, optical device fabrication, optical waveguides, silicon on insulator technology",

author = "Kimmo Solehmainen and Timo Aalto and James Dekker and Markku Kapulainen and Mikko Harjanne and P{\"a}ivi Heimala",

note = "Project code: T4SU00310; European Optical Society Topical Meeting on Optical Microsystem, OMS '05 ; Conference date: 15-09-2005 Through 18-09-2005",

year = "2005",

language = "English",

booktitle = "European Optical Society Topical Meeting on Optical Microsystems, OµS'05",

}

Solehmainen, K, Aalto, T , Dekker, J , Kapulainen, M , Harjanne, M & Heimala, P 2005, Development of multi-step processing in silicon-on-insulator for optical waveguide applications. in European Optical Society Topical Meeting on Optical Microsystems, OµS'05: Book of Abstracts., 111, European Optical Society Topical Meeting on Optical Microsystem, OMS '05, Capri, Italy, 15/09/05.

Development of multi-step processing in silicon-on-insulator for optical waveguide applications. / Solehmainen, Kimmo; Aalto, Timo ; Dekker, James et al.
European Optical Society Topical Meeting on Optical Microsystems, OµS'05: Book of Abstracts. 2005. 111.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Development of multi-step processing in silicon-on-insulator for optical waveguide applications

AU - Solehmainen, Kimmo

AU - Aalto, Timo

AU - Dekker, James

AU - Kapulainen, Markku

AU - Harjanne, Mikko

AU - Heimala, Päivi

N1 - Project code: T4SU00310

PY - 2005

Y1 - 2005

N2 - Multi-step processing for the silicon-on-insulator (SOI) platform was developed. It allows the realisation of additional levels to basic microphotonic structures, so that waveguides with different cross-sections can be combined. The concept is based on simple process steps, which are easily scalable for mass-production. The developed processes were tested with different optical structures

AB - Multi-step processing for the silicon-on-insulator (SOI) platform was developed. It allows the realisation of additional levels to basic microphotonic structures, so that waveguides with different cross-sections can be combined. The concept is based on simple process steps, which are easily scalable for mass-production. The developed processes were tested with different optical structures

KW - integrated optics

KW - optical device fabrication

KW - optical waveguides

KW - silicon on insulator technology

M3 - Conference abstract in proceedings

BT - European Optical Society Topical Meeting on Optical Microsystems, OµS'05

T2 - European Optical Society Topical Meeting on Optical Microsystem, OMS '05

Y2 - 15 September 2005 through 18 September 2005

ER -

Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Abstract

Conference

Keywords

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