Development of multi-step processing in silicon-on-insulator for optical waveguide applications

Kimmo Solehmainen (Corresponding Author), Timo Aalto, James Dekker, Markku Kapulainen, Mikko Harjanne, Päivi Heimala

Research output: Contribution to journalArticleScientificpeer-review

40 Citations (Scopus)

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Chemical Compounds

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