Development of optical phased arrays in a micron-scale silicon photonics platform

Sidra Tul Muntaha (Corresponding author), Ari Hokkanen, Mikko Harjanne, Matteo Cherchi, Pekka Suopajärvi, Petri Karvinen, Markku Pekkarinen, Matthieu Roussey, Timo Aalto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


We have designed and fabricated micro-LiDAR chips based on 1D optical phased arrays (OPAs) that collimate light in the horizontal direction only. Thus, a cylindrical lens is needed for the vertical collimation. A part of the work demonstrates the analysis of 1D beam steering experiments through the direct outcoupling from the waveguide facets with two straight cylindrical lenses available commercially and a detailed analysis based on the parameters like Rayleigh range and beam divergence is presented. This work also demonstrates the characterizations of 3D printed curved cylindrical collimating lenses. A thorough analysis based on the experimental work resulted in certain suggestions to improve the collimation and to perform the beam steering in a better way.
Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XXVI
EditorsSonia M. Garcia-Blanco, Pavel Cheben
PublisherInternational Society for Optics and Photonics SPIE
Number of pages7
ISBN (Electronic)9781510648791
Publication statusPublished - 5 Mar 2022
MoE publication typeA4 Article in a conference publication
EventIntegrated Optics: Devices, Materials, and Technologies XXVI: Online - Virtual, San Francisco, United States
Duration: 20 Feb 202224 Feb 2022

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering


ConferenceIntegrated Optics: Devices, Materials, and Technologies XXVI
Country/TerritoryUnited States
CitySan Francisco


  • 3D printed lens
  • beam collimation
  • LiDAR
  • Optical phased array
  • straight cylindrical lens


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