Development of silicon-on-insulator waveguide technology

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    9 Citations (Scopus)

    Abstract

    An overview of the present silicon-on-insulator (SOI) waveguide technology is given and supplemented with an extensive set of theory and simulation results. Characteristics of slab-, rectangular- and ridge waveguides in SOI are explained. In particular, the number of modes and the single-mode conditions are carefully analyzed. Experimental work with straight and bent 8 to 10 µm thick SOI ridge waveguides and a very fast thermo-optical switch are reported. Propagation loss in a very long spiral waveguide down to 0.3 dB/cm, waveguide birefringence below 10-4, and a switching frequency up to 167 kHz were obtained. A very promising multi-step patterning principle for SOI waveguides is described together with many practical application examples
    Original languageEnglish
    Title of host publicationIntegrated Optics
    Subtitle of host publicationDevices, Materials, and Technologies VIII
    EditorsYakov Sidorin, Ari Tervonen
    PublisherInternational Society for Optics and Photonics SPIE
    Pages81-95
    ISBN (Print)0-8194-5263-7
    DOIs
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    EventIntegrated Optoelectronic Devices 2004 - San Jose, United States
    Duration: 26 Jan 200429 Jan 2004

    Publication series

    SeriesProceedings of SPIE
    Volume5355
    ISSN0277-786X

    Conference

    ConferenceIntegrated Optoelectronic Devices 2004
    CountryUnited States
    CitySan Jose
    Period26/01/0429/01/04

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    Keywords

    • silicon-on-insulator
    • SOI
    • waveguide
    • ridge waveguide
    • thermo-optical switch
    • polarization
    • polarization extinction ratio
    • birefringence

    Cite this

    Aalto, T., Harjanne, M., Kapulainen, M., Heimala, P., & Leppihalme, M. (2004). Development of silicon-on-insulator waveguide technology. In Y. Sidorin, & A. Tervonen (Eds.), Integrated Optics: Devices, Materials, and Technologies VIII (pp. 81-95). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 5355 https://doi.org/10.1117/12.537540