@inproceedings{d9b08f9fd9524306a6906dcbd74d7279,
title = "Development of silicon-on-insulator waveguide technology",
abstract = "An overview of the present silicon-on-insulator (SOI) waveguide technology is given and supplemented with an extensive set of theory and simulation results. Characteristics of slab-, rectangular- and ridge waveguides in SOI are explained. In particular, the number of modes and the single-mode conditions are carefully analyzed. Experimental work with straight and bent 8 to 10 µm thick SOI ridge waveguides and a very fast thermo-optical switch are reported. Propagation loss in a very long spiral waveguide down to 0.3 dB/cm, waveguide birefringence below 10-4, and a switching frequency up to 167 kHz were obtained. A very promising multi-step patterning principle for SOI waveguides is described together with many practical application examples",
keywords = "silicon-on-insulator, SOI, waveguide, ridge waveguide, thermo-optical switch, polarization, polarization extinction ratio, birefringence",
author = "Timo Aalto and Mikko Harjanne and Markku Kapulainen and P{\"a}ivi Heimala and Matti Leppihalme",
note = "CA2: TTE6 CA: TTE Project code: T3SU00354; Integrated Optoelectronic Devices 2004 : Photonics Packaging and Integration IV ; Conference date: 26-01-2004 Through 29-01-2004",
year = "2004",
doi = "10.1117/12.537540",
language = "English",
isbn = "0-8194-5263-7",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "81--95",
editor = "Yakov Sidorin and Ari Tervonen",
booktitle = "Integrated Optics",
address = "United States",
}