Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen, Antti Hakola, T. Kajava (Corresponding Author)

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Abstract

We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
Original languageEnglish
Article number11013
Number of pages5
JournalJournal of the European Optical Society: Rapid Publications
Volume6
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

excimer lasers
pulsed laser deposition
laser beams
beam splitters
fluence
deposits
gratings

Cite this

@article{981d180fe4eb48109a313198319fafe1,
title = "Diffractive shaping of excimer-laser beams for pulsed laser deposition",
abstract = "We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.",
author = "V. Kekkonen and Antti Hakola and T. Kajava",
year = "2011",
doi = "10.2971/jeos.2011.11013s",
language = "English",
volume = "6",
journal = "Journal of the European Optical Society: Rapid Publications",
issn = "1990-2573",
publisher = "European optical society",

}

Diffractive shaping of excimer-laser beams for pulsed laser deposition. / Kekkonen, V.; Hakola, Antti; Kajava, T. (Corresponding Author).

In: Journal of the European Optical Society: Rapid Publications, Vol. 6, 11013, 2011.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Diffractive shaping of excimer-laser beams for pulsed laser deposition

AU - Kekkonen, V.

AU - Hakola, Antti

AU - Kajava, T.

PY - 2011

Y1 - 2011

N2 - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

AB - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

U2 - 10.2971/jeos.2011.11013s

DO - 10.2971/jeos.2011.11013s

M3 - Article

VL - 6

JO - Journal of the European Optical Society: Rapid Publications

JF - Journal of the European Optical Society: Rapid Publications

SN - 1990-2573

M1 - 11013

ER -