Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen, Antti Hakola, T. Kajava (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)


    We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
    Original languageEnglish
    Article number11013
    Number of pages5
    JournalJournal of the European Optical Society: Rapid Publications
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed


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