We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
|Number of pages||5|
|Journal||Journal of the European Optical Society: Rapid Publications|
|Publication status||Published - 2011|
|MoE publication type||A1 Journal article-refereed|
Kekkonen, V., Hakola, A., & Kajava, T. (2011). Diffractive shaping of excimer-laser beams for pulsed laser deposition. Journal of the European Optical Society: Rapid Publications, 6, . https://doi.org/10.2971/jeos.2011.11013s