Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen; Antti Hakola; T. Kajava

doi:10.2971/jeos.2011.11013s

Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen, Antti Hakola, T. Kajava (Corresponding Author)

Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Abstract

We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

Original language	English
Article number	11013
Number of pages	5
Journal	Journal of the European Optical Society: Rapid Publications
Volume	6
DOIs	https://doi.org/10.2971/jeos.2011.11013s
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

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10.2971/jeos.2011.11013s

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title = "Diffractive shaping of excimer-laser beams for pulsed laser deposition",

abstract = "We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.",

author = "V. Kekkonen and Antti Hakola and T. Kajava",

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AU - Kekkonen, V.

AU - Hakola, Antti

AU - Kajava, T.

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AB - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

U2 - 10.2971/jeos.2011.11013s

DO - 10.2971/jeos.2011.11013s

M3 - Article

SN - 1990-2573

VL - 6

JO - Journal of the European Optical Society: Rapid Publications

JF - Journal of the European Optical Society: Rapid Publications

M1 - 11013

ER -

Diffractive shaping of excimer-laser beams for pulsed laser deposition

Abstract

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