Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen, Antti Hakola, T. Kajava (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)

    Abstract

    We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
    Original languageEnglish
    Article number11013
    Number of pages5
    JournalJournal of the European Optical Society: Rapid Publications
    Volume6
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

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    excimer lasers
    pulsed laser deposition
    laser beams
    beam splitters
    fluence
    deposits
    gratings

    Cite this

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    title = "Diffractive shaping of excimer-laser beams for pulsed laser deposition",
    abstract = "We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.",
    author = "V. Kekkonen and Antti Hakola and T. Kajava",
    year = "2011",
    doi = "10.2971/jeos.2011.11013s",
    language = "English",
    volume = "6",
    journal = "Journal of the European Optical Society: Rapid Publications",
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    publisher = "European optical society",

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    Diffractive shaping of excimer-laser beams for pulsed laser deposition. / Kekkonen, V.; Hakola, Antti; Kajava, T. (Corresponding Author).

    In: Journal of the European Optical Society: Rapid Publications, Vol. 6, 11013, 2011.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Diffractive shaping of excimer-laser beams for pulsed laser deposition

    AU - Kekkonen, V.

    AU - Hakola, Antti

    AU - Kajava, T.

    PY - 2011

    Y1 - 2011

    N2 - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

    AB - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 22 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

    U2 - 10.2971/jeos.2011.11013s

    DO - 10.2971/jeos.2011.11013s

    M3 - Article

    VL - 6

    JO - Journal of the European Optical Society: Rapid Publications

    JF - Journal of the European Optical Society: Rapid Publications

    SN - 1990-2573

    M1 - 11013

    ER -