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Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure
Yossef Ezer (Corresponding Author), Jaakko Härkönen, Vadim Sokolov, Jaakko Saarilahti, Jyrki Kaitila, Pekka Kuivalainen
Research output: Contribution to journal › Article › Scientific › peer-review
20
Citations
(Scopus)