Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure
- Yossef Ezer*
- , Jaakko Härkönen
- , Vadim Sokolov
- , Jaakko Saarilahti
- , Jyrki Kaitila
- , Pekka Kuivalainen
*Corresponding author for this work
- Helsinki University of Technology
Research output: Contribution to journal › Article › Scientific › peer-review
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