Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure

Yossef Ezer (Corresponding Author), Jaakko Härkönen, Vadim Sokolov, Jaakko Saarilahti, Jyrki Kaitila, Pekka Kuivalainen

    Research output: Contribution to journalArticleScientificpeer-review

    20 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science

    Physics & Astronomy