Diffusion Barrier Performance of thin Cr Films in the Cu/Cr/Si Structure

Y. Ezer, J. Härkönen, S. Arpiainen, V. Sokolov, P. Kuivalainen, J. Saarilahti, J. Kaitila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Diffusion Barrier Performance of thin Cr Films in the Cu/Cr/Si Structure'. Together they form a unique fingerprint.

    Physics & Astronomy

    Mathematics