@inproceedings{630196ba121d4fa69b6f32e9d9d60613,
title = "Diffusion of arsenic in Germanium",
author = "Jari Likonen and E. Vainonen-Ahlgren and T. Ahlgren and Sari Lehto",
year = "2000",
language = "English",
isbn = "978-0-444-50323-7",
pages = "685--688",
editor = "A. Benninghoven and P. Bertrand and H.-N. Migeon",
booktitle = "Secondary ion mass spectrometry SIMS XII",
publisher = "Elsevier",
address = "Netherlands",
note = "12th International Conference on Secondary Ion Mass Spectrometry, SIMS XII ; Conference date: 05-09-1999 Through 11-09-1999",
}