Abstract
The acoustic wave fields excited in a 1.8 GHz AlN thin
film bulk acoustic wave resonator are measured in detail
with a heterodyne laser interferometer. The electrical
response of the resonator exhibits a strong thickness
resonance onto which spurious modes, caused by lateral
standing plate waves, are superposed. The acoustic wave
fields are measured with a heterodyne interferometer and
are used to calculate dispersion diagram of the laterally
propagating waves responsible for the spurious electrical
responses. The dispersion diagram features a discrete
eigenmode spectrum due to the finite lateral dimensions
of the resonator. An equivalent circuit model for a
multi-mode resonator is fitted to the mechanical
resonator response extracted along a single curve in the
dispersion diagram, and is used to determine properties,
such as Q-values, of the individual lateral eigenmodes.
Measured wave field images, extracted dispersion curves,
and the eigenmode spectrum with the model fitting results
are presented
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Ultrasonics Symposium, IUS 2010 |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 420-423 |
| ISBN (Electronic) | 978-1-4577-0381-2 |
| ISBN (Print) | 978-1-4577-0382-9 |
| DOIs | |
| Publication status | Published - 2010 |
| MoE publication type | A4 Article in a conference publication |
| Event | IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States Duration: 11 Oct 2010 → 14 Oct 2010 |
Conference
| Conference | IEEE International Ultrasonics Symposium, IUS 2010 |
|---|---|
| Country/Territory | United States |
| City | San Diego, CA |
| Period | 11/10/10 → 14/10/10 |