Direct patterning of micro-optical structures by combined nanoimprinting and lithography

Jarkko Tuominen, Jussi Hiltunen, A. Wojdyla, Mikko Karppinen, A. Suutala, H. Jantunen, R. Bouffaron, L. Escoubas

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


The driving force behind combining the nanoimprinting and photolithography is to effectively utilize the advantages of both patterning techniques simultaneously. Conventional shadow-mask UV-lithography can be used to pattern micron-scale structures uniformly over large areas, whereas nanoimprinting enables patterning of nanoscale features, which can also be tilted or round-shaped. We present the work on direct patterning of micro-optical structures by combined nanoimprinting and lithography using modified mask aligner, hybrid mask mold and directly patternable, UV-curable materials. Patterning of structures is carried out in wafer-level fashion. Hybrid mask mold fabrication can be realized for example by modifying conventional shadow-mask using focused ion beam (FIB) milling, or by patterning a mold area on shadow-mask surface by nanoimprinting. One of the advantages of proposed fabrication method is that there is no need for reactive ion etching (RIE) process steps. We present also near-field holography (NFH) as a method of grating mold fabrication. Fabricated micro-optical structures include directly patterned waveguides with light coupling gratings, and also pyramid-shaped gratings which show antireflection properties in the mid-infrared spectral region.
Original languageEnglish
Title of host publicationMicro-Optics 2008
PublisherInternational Society for Optics and Photonics SPIE
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventMicro-Optics 2008. Strasbourg, France, 7 April 2008 -
Duration: 1 Jan 2008 → …

Publication series

SeriesProceedings of SPIE


ConferenceMicro-Optics 2008. Strasbourg, France, 7 April 2008
Period1/01/08 → …


  • Antireflection coating
  • Diffractive grating
  • Direct patterning
  • Infrared
  • Polymer waveguide
  • UV-NIL

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