Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication

Ari Kärkkäinen, John M. Tamkin, Jeremy D. Rogers, Daniel R. Neal, Osmo Hormi, Ghassan E. Jabbour, Juha Rantala, Michael R. Descour

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy