Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication

Ari Kärkkäinen, John M. Tamkin, Jeremy D. Rogers, Daniel R. Neal, Osmo Hormi, Ghassan E. Jabbour, Juha Rantala, Michael R. Descour

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication'. Together they form a unique fingerprint.

Keyphrases

INIS

Engineering

Material Science