Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

Juha Rantala, Raviv Levy, Liisa Kivimäki, Michael Descour

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The hybrid sol-gel method is applied to the fabrication of optical and mechanical structures into a photosensitive glass material. High optical quality thick films and structures are fabricated by a one-step spin-coating process followed by direct UV imprinting. A material thickness of 27.5 µm and a maximum patterned thickness of 17.4 µm at an aspect ratio of 0.6 have been achieved. The material exhibits a minimum transmittance of 97% between 400 and 1100 nm, a refractive index of 1.49, and an RMS surface roughness of 14.8 nm after development.

Original languageEnglish
Pages (from-to)530 - 531
Number of pages2
JournalElectronics Letters
Volume36
Issue number6
DOIs
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

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