Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures

Juha Rantala, S. Juuso, Raviv Levy, Liisa Kivimäki, Michael Descour

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Optical MEMS, IEEE/LEOS
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	111 - 112
ISBN (Print)	978-0-7803-6257-4
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMS - Kauai, United States Duration: 21 Aug 2000 → 24 Aug 2000

Conference	IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Kauai
Period	21/08/00 → 24/08/00

Cite this

@inproceedings{4c75eea9e67f4dbc98c706cae767026d,

title = "Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures",

author = "Juha Rantala and S. Juuso and Raviv Levy and Liisa Kivim{\"a}ki and Michael Descour",

year = "2000",

language = "English",

isbn = "978-0-7803-6257-4",

pages = "111 -- 112",

booktitle = "Optical MEMS, IEEE/LEOS",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMS ; Conference date: 21-08-2000 Through 24-08-2000",

}

TY - GEN

T1 - Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures

AU - Rantala, Juha

AU - Juuso, S.

AU - Levy, Raviv

AU - Kivimäki, Liisa

AU - Descour, Michael

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SN - 978-0-7803-6257-4

SP - 111

EP - 112

BT - Optical MEMS, IEEE/LEOS

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE/LEOS International Conference on Optical MEMS

Y2 - 21 August 2000 through 24 August 2000

ER -