Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures

Juha Rantala, S. Juuso, Raviv Levy, Liisa Kivimäki, Michael Descour

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationOptical MEMS, IEEE/LEOS
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages111 - 112
    ISBN (Print)978-0-7803-6257-4
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventIEEE/LEOS International Conference on Optical MEMS - Kauai, United States
    Duration: 21 Aug 200024 Aug 2000


    ConferenceIEEE/LEOS International Conference on Optical MEMS
    Country/TerritoryUnited States

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