@inproceedings{4c75eea9e67f4dbc98c706cae767026d,
title = "Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures",
author = "Juha Rantala and S. Juuso and Raviv Levy and Liisa Kivim{\"a}ki and Michael Descour",
year = "2000",
language = "English",
isbn = "978-0-7803-6257-4",
pages = "111 -- 112",
booktitle = "Optical MEMS, IEEE/LEOS",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "IEEE/LEOS International Conference on Optical MEMS ; Conference date: 21-08-2000 Through 24-08-2000",
}