Directly patternable thick film hybrid glass materials for miro-opto-mechanical structures

Juha Rantala, S. Juuso, Raviv Levy, Liisa Kivimäki, Michael Descour

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationOptical MEMS, IEEE/LEOS
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages111 - 112
ISBN (Print)978-0-7803-6257-4
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMS - Kauai, United States
Duration: 21 Aug 200024 Aug 2000


ConferenceIEEE/LEOS International Conference on Optical MEMS
CountryUnited States

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