In this study, the sol-gel process to fabricate directly
UV-photopatternable lanthanum-doped lead zirconate titanate
(PLZT) films was investigated. Photosensitive films were obtained via
methacrylic acid modification of metal organic
PLZT precursors. Spin-on deposited films were patterned using direct
UV-photolithography process. Patterned films
were annealed in air, in order to obtain perovskite type crystalline material.
AFM and XRD techniques were used for the
characterization of the material and fabricated structures. The sol-gel
processed PLZT films had good crystallinity, they
were crack-free, and had low surface roughness. The films exhibit
electro-optic effect being therefore interesting to be used in active
integrated optic devices.
|Series||Proceedings of SPIE|
- direct UV-photopatterning
- electro-optic effect