Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kimmo Kokkonen, Tuomas Pensala, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.
Original languageEnglish
Pages (from-to)215-225
Number of pages11
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume58
Issue number1
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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Resonators
Mirrors
resonators
Acoustic waves
mirrors
acoustics
Vibrations (mechanical)
Acoustics
diagrams
vibration
wave dispersion
Wave transmission
longitudinal waves
Substrates
Interferometers
interferometers
frequency ranges
Glass
Thin films
Lasers

Cite this

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title = "Dispersion and mirror transmission characteristics of bulk acoustic wave resonators",
abstract = "A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.",
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pages = "215--225",
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issn = "0885-3010",
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Dispersion and mirror transmission characteristics of bulk acoustic wave resonators. / Kokkonen, Kimmo; Pensala, Tuomas; Kaivola, Matti.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 58, No. 1, 2011, p. 215-225.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

AU - Kokkonen, Kimmo

AU - Pensala, Tuomas

AU - Kaivola, Matti

PY - 2011

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N2 - A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.

AB - A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.

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DO - 10.1109/TUFFC.2011.1788

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

SN - 0885-3010

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