Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kimmo Kokkonen, Tuomas Pensala, Matti Kaivola

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)

    Abstract

    A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.
    Original languageEnglish
    Pages (from-to)215-225
    Number of pages11
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Volume58
    Issue number1
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Resonators
    Mirrors
    resonators
    Acoustic waves
    mirrors
    acoustics
    Vibrations (mechanical)
    Acoustics
    diagrams
    vibration
    wave dispersion
    Wave transmission
    longitudinal waves
    Substrates
    Interferometers
    interferometers
    frequency ranges
    Glass
    Thin films
    Lasers

    Cite this

    @article{ba3bc1d6c0c945c389a8d3a934210f7e,
    title = "Dispersion and mirror transmission characteristics of bulk acoustic wave resonators",
    abstract = "A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.",
    author = "Kimmo Kokkonen and Tuomas Pensala and Matti Kaivola",
    year = "2011",
    doi = "10.1109/TUFFC.2011.1788",
    language = "English",
    volume = "58",
    pages = "215--225",
    journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",
    issn = "0885-3010",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    number = "1",

    }

    Dispersion and mirror transmission characteristics of bulk acoustic wave resonators. / Kokkonen, Kimmo; Pensala, Tuomas; Kaivola, Matti.

    In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 58, No. 1, 2011, p. 215-225.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

    AU - Kokkonen, Kimmo

    AU - Pensala, Tuomas

    AU - Kaivola, Matti

    PY - 2011

    Y1 - 2011

    N2 - A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.

    AB - A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.

    U2 - 10.1109/TUFFC.2011.1788

    DO - 10.1109/TUFFC.2011.1788

    M3 - Article

    VL - 58

    SP - 215

    EP - 225

    JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

    JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

    SN - 0885-3010

    IS - 1

    ER -