Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kimmo Kokkonen, Tuomas Pensala, Matti Kaivola

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)


    A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.
    Original languageEnglish
    Pages (from-to)215-225
    Number of pages11
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Issue number1
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed


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