Dispersion of confined acoustic phonons in ultra-thin silicon membranes

Mika Prunnila, Jouni Ahopelto, J. Cuffe, E. Chavez, P.-O. Chapuis, E.H. El Boudoti, F. Alzina, D. Dudek, Y. Pennec, B. Djafari-Rouhani, Andrey Shchepetov, Clivia M. Sotomayor Torres

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of the
membranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.
Original languageEnglish
Title of host publicationEUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits
Subtitle of host publicationConference Proceedings
PublisherUniversidad de Granada
Pages125-126
Publication statusPublished - 2011
MoE publication typeNot Eligible
Event7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011 - Granada, Spain
Duration: 17 Jan 201119 Jan 2011

Conference

Conference7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011
Abbreviated titleEUROSOI 2011
CountrySpain
CityGranada
Period17/01/1119/01/11

Fingerprint

phonons
membranes
acoustics
silicon
light scattering
Green's functions
elastic properties
continuums
oxides
curves
spectroscopy
simulation

Cite this

Prunnila, M., Ahopelto, J., Cuffe, J., Chavez, E., Chapuis, P-O., El Boudoti, E. H., ... Sotomayor Torres, C. M. (2011). Dispersion of confined acoustic phonons in ultra-thin silicon membranes. In EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings (pp. 125-126). Universidad de Granada.
Prunnila, Mika ; Ahopelto, Jouni ; Cuffe, J. ; Chavez, E. ; Chapuis, P.-O. ; El Boudoti, E.H. ; Alzina, F. ; Dudek, D. ; Pennec, Y. ; Djafari-Rouhani, B. ; Shchepetov, Andrey ; Sotomayor Torres, Clivia M. / Dispersion of confined acoustic phonons in ultra-thin silicon membranes. EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, 2011. pp. 125-126
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title = "Dispersion of confined acoustic phonons in ultra-thin silicon membranes",
abstract = "The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.",
author = "Mika Prunnila and Jouni Ahopelto and J. Cuffe and E. Chavez and P.-O. Chapuis and {El Boudoti}, E.H. and F. Alzina and D. Dudek and Y. Pennec and B. Djafari-Rouhani and Andrey Shchepetov and {Sotomayor Torres}, {Clivia M.}",
year = "2011",
language = "English",
pages = "125--126",
booktitle = "EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits",
publisher = "Universidad de Granada",
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}

Prunnila, M, Ahopelto, J, Cuffe, J, Chavez, E, Chapuis, P-O, El Boudoti, EH, Alzina, F, Dudek, D, Pennec, Y, Djafari-Rouhani, B, Shchepetov, A & Sotomayor Torres, CM 2011, Dispersion of confined acoustic phonons in ultra-thin silicon membranes. in EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, pp. 125-126, 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011, Granada, Spain, 17/01/11.

Dispersion of confined acoustic phonons in ultra-thin silicon membranes. / Prunnila, Mika; Ahopelto, Jouni; Cuffe, J.; Chavez, E.; Chapuis, P.-O.; El Boudoti, E.H.; Alzina, F.; Dudek, D.; Pennec, Y.; Djafari-Rouhani, B.; Shchepetov, Andrey; Sotomayor Torres, Clivia M.

EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, 2011. p. 125-126.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Dispersion of confined acoustic phonons in ultra-thin silicon membranes

AU - Prunnila, Mika

AU - Ahopelto, Jouni

AU - Cuffe, J.

AU - Chavez, E.

AU - Chapuis, P.-O.

AU - El Boudoti, E.H.

AU - Alzina, F.

AU - Dudek, D.

AU - Pennec, Y.

AU - Djafari-Rouhani, B.

AU - Shchepetov, Andrey

AU - Sotomayor Torres, Clivia M.

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N2 - The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.

AB - The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.

M3 - Conference article in proceedings

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EP - 126

BT - EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits

PB - Universidad de Granada

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Prunnila M, Ahopelto J, Cuffe J, Chavez E, Chapuis P-O, El Boudoti EH et al. Dispersion of confined acoustic phonons in ultra-thin silicon membranes. In EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada. 2011. p. 125-126