Dispersion of confined acoustic phonons in ultra-thin silicon membranes

Mika Prunnila, Jouni Ahopelto, J. Cuffe, E. Chavez, P.-O. Chapuis, E.H. El Boudoti, F. Alzina, D. Dudek, Y. Pennec, B. Djafari-Rouhani, Andrey Shchepetov, Clivia M. Sotomayor Torres

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of the
    membranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.
    Original languageEnglish
    Title of host publicationEUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits
    Subtitle of host publicationConference Proceedings
    PublisherUniversidad de Granada
    Pages125-126
    Publication statusPublished - 2011
    MoE publication typeNot Eligible
    Event7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011 - Granada, Spain
    Duration: 17 Jan 201119 Jan 2011

    Conference

    Conference7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011
    Abbreviated titleEUROSOI 2011
    CountrySpain
    CityGranada
    Period17/01/1119/01/11

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  • Cite this

    Prunnila, M., Ahopelto, J., Cuffe, J., Chavez, E., Chapuis, P-O., El Boudoti, E. H., Alzina, F., Dudek, D., Pennec, Y., Djafari-Rouhani, B., Shchepetov, A., & Sotomayor Torres, C. M. (2011). Dispersion of confined acoustic phonons in ultra-thin silicon membranes. In EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings (pp. 125-126). Universidad de Granada. https://cordis.europa.eu/docs/projects/cnect/3/216373/080/deliverables/001-EUROSOID410.pdf