Dispersion of confined acoustic phonons in ultra-thin silicon membranes

Mika Prunnila; Jouni Ahopelto; J. Cuffe; E. Chavez; P.-O. Chapuis; E.H. El Boudoti; F. Alzina; D. Dudek; Y. Pennec; B. Djafari-Rouhani; Andrey Shchepetov; Clivia M. Sotomayor Torres

Dispersion of confined acoustic phonons in ultra-thin silicon membranes

Mika Prunnila, Jouni Ahopelto, J. Cuffe, E. Chavez, P.-O. Chapuis, E.H. El Boudoti, F. Alzina, D. Dudek, Y. Pennec, B. Djafari-Rouhani, Andrey Shchepetov, Clivia M. Sotomayor Torres

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of the
membranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.

Original language	English
Title of host publication	EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits
Subtitle of host publication	Conference Proceedings
Publisher	Universidad de Granada
Pages	125-126
Publication status	Published - 2011
MoE publication type	Not Eligible
Event	7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011 - Granada, Spain Duration: 17 Jan 2011 → 19 Jan 2011

Conference

Conference	7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011
Abbreviated title	EUROSOI 2011
Country/Territory	Spain
City	Granada
Period	17/01/11 → 19/01/11

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https://cordis.europa.eu/docs/projects/cnect/3/216373/080/deliverables/001-EUROSOID410.pdf

Cite this

Prunnila, M., Ahopelto, J., Cuffe, J., Chavez, E., Chapuis, P.-O., El Boudoti, E. H., Alzina, F., Dudek, D., Pennec, Y., Djafari-Rouhani, B., Shchepetov, A., & Sotomayor Torres, C. M. (2011). Dispersion of confined acoustic phonons in ultra-thin silicon membranes. In EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings (pp. 125-126). Universidad de Granada. https://cordis.europa.eu/docs/projects/cnect/3/216373/080/deliverables/001-EUROSOID410.pdf

@inproceedings{5d90e7c9e7fb478cb731e2a71e951754,

title = "Dispersion of confined acoustic phonons in ultra-thin silicon membranes",

abstract = "The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green{\textquoteright}s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes. ",

author = "Mika Prunnila and Jouni Ahopelto and J. Cuffe and E. Chavez and P.-O. Chapuis and {El Boudoti}, E.H. and F. Alzina and D. Dudek and Y. Pennec and B. Djafari-Rouhani and Andrey Shchepetov and {Sotomayor Torres}, {Clivia M.}",

year = "2011",

language = "English",

pages = "125--126",

booktitle = "EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits",

publisher = "Universidad de Granada",

address = "Spain",

note = "7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011, EUROSOI 2011 ; Conference date: 17-01-2011 Through 19-01-2011",

}

Prunnila, M , Ahopelto, J, Cuffe, J, Chavez, E, Chapuis, P-O, El Boudoti, EH, Alzina, F, Dudek, D, Pennec, Y, Djafari-Rouhani, B, Shchepetov, A & Sotomayor Torres, CM 2011, Dispersion of confined acoustic phonons in ultra-thin silicon membranes. in EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, pp. 125-126, 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011, Granada, Spain, 17/01/11. <https://cordis.europa.eu/docs/projects/cnect/3/216373/080/deliverables/001-EUROSOID410.pdf>

Dispersion of confined acoustic phonons in ultra-thin silicon membranes. / Prunnila, Mika ; Ahopelto, Jouni; Cuffe, J. et al.
EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, 2011. p. 125-126.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Dispersion of confined acoustic phonons in ultra-thin silicon membranes

AU - Prunnila, Mika

AU - Ahopelto, Jouni

AU - Cuffe, J.

AU - Chavez, E.

AU - Chapuis, P.-O.

AU - El Boudoti, E.H.

AU - Alzina, F.

AU - Dudek, D.

AU - Pennec, Y.

AU - Djafari-Rouhani, B.

AU - Shchepetov, Andrey

AU - Sotomayor Torres, Clivia M.

PY - 2011

Y1 - 2011

N2 - The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.

AB - The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.

M3 - Conference article in proceedings

SP - 125

EP - 126

BT - EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits

PB - Universidad de Granada

T2 - 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011

Y2 - 17 January 2011 through 19 January 2011

ER -

Dispersion of confined acoustic phonons in ultra-thin silicon membranes

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